Abstract: A polishing delivery apparatus, configured to provide slurry and rinse agent to a polishing pad, includes a delivery arm, at least one first nozzle, and at least one second nozzle. The delivery arm is rotatably connected to the polishing pad and has an arc-shaped top surface facing away from the polishing pad, a bottom surface facing away from the arc-shaped top surface, and a recess indenting from the bottom surface. The first nozzle is mounted on the bottom surface of the delivery arm and has a first nozzle head facing toward the polishing pad. The second nozzle is mounted in the recess of the delivery arm and has three second nozzle heads, in which one of the three second nozzle heads faces toward the polishing pad, and the other two of the three second nozzle heads face toward sidewalls of the recess.

Abstract: A polishing delivery apparatus, configured to provide slurry and rinse agent to a polishing pad, includes a delivery arm, at least one first nozzle, and at least one second nozzle. The delivery arm is rotatably connected to the polishing pad and has an arc-shaped top surface facing away from the polishing pad, a bottom surface facing away from the arc-shaped top surface, and a recess indenting from the bottom surface. The first nozzle is mounted on the bottom surface of the delivery arm and has a first nozzle head facing toward the polishing pad. The second nozzle is mounted in the recess of the delivery arm and has three second nozzle heads, in which one of the three second nozzle heads faces toward the polishing pad, and the other two of the three second nozzle heads face toward sidewalls of the recess.

Abstract: A multi-phase voltage regulator includes a pulse width modulation control unit, a pulse signal extension circuit, M counts of current providing paths, and a feedback signal switching circuit. The pulse width modulation control unit generates N counts of pulse signals in a first cycle period. The pulse signal extension circuit receives the N counts of pulse signals in a second cycle period and divides the N counts of pulse signals into M counts of pulse signals, wherein M=N×2K, K is a positive integer, and the second cycle period is 2K times the first cycle period. The M counts of current providing paths generate corresponding M counts of sensing voltages. The feedback signal switching circuit receives the M counts of sensing voltages, successively switches the M counts of sensing voltages into N counts of sensing voltages, and transmits the N counts of sensing voltages to the pulse width modulation control unit.