Abstract: Methods and structures for modulating an inner spacer profile include providing a fin having an epitaxial layer stack including a plurality of semiconductor channel layers interposed by a plurality of dummy layers. In some embodiments, the method further includes removing the plurality of dummy layers to form a first gap between adjacent semiconductor channel layers of the plurality of semiconductor channel layers. Thereafter, in some examples, the method includes conformally depositing a dielectric layer to substantially fill the first gap between the adjacent semiconductor channel layers. In some cases, the method further includes etching exposed lateral surfaces of the dielectric layer to form an etched-back dielectric layer that defines substantially V-shaped recesses. In some embodiments, the method further includes forming a substantially V-shaped inner spacer within the substantially V-shaped recesses.

Abstract: Embodiments of the present disclosure provide a method for forming semiconductor device structures. The method includes forming a fin structure having a stack of semiconductor layers comprising first semiconductor layers and second semiconductor layers alternatingly arranged, forming a sacrificial gate structure over a portion of the fin structure, removing the first and second semiconductor layers in a source/drain region of the fin structure that is not covered by the sacrificial gate structure, forming an epitaxial source/drain feature in the source/drain region, removing portions of the sacrificial gate structure to expose the first and second semiconductor layers, removing portions of the second semiconductor layers so that at least one second semiconductor layer has a width less than a width of each of the first semiconductor layers, forming a conformal gate dielectric layer on exposed first and second semiconductor layers, and forming a gate electrode layer on the conformal gate dielectric layer.

Abstract: A whipsaw for carrying a wafer in wafer cleaning is disclosed. The whipsaw may include a cleaning tank, an annular groove around a peripheral of the cleaning tank, a discharge chute disposed between the cleaning tank and the annular groove, at least one first flow channel communicative of the cleaning tank and the discharge chute, and at least one second flow channel communicative of the annular groove and the discharge chute. When the wafer with a tape is placed in the whipsaw, the wafer may correspond to the cleaning tank, and a portion of the tape unmasked by the wafer may correspond to the annular groove. The first flow channel provides a first fluid into the cleaning tank with the first fluid cleaning the wafer, and the second flow channel provides a second fluid into the annular groove with the second fluid isolating the first fluid from the tape.

Abstract: An on-road energy conversion and vibration absorber apparatus receives the kinetic energy from moving vehicles and pedestrians when being weighed down, and converts the received kinetic energy into a potential energy using a restorable elastic element compressing a fluid thereby storing the potential energy in a pressure chamber, and then conducting the pressurized fluid to pass though a check valve along a conduit and drive a vane wheel by releasing its potential energy. The vane wheel in turn drives a generator to generate electric energy, and the vibration of the vehicles is alleviated by cushion effect provided by the apparatus.

Abstract: An on-road energy conversion and vibration absorber apparatus receives the kinetic energy from moving vehicles and pedestrians when being weighed down, and converts the received kinetic energy into a potential energy using a restorable elastic element compressing a fluid thereby storing the potential energy in a pressure chamber, and then conducting the pressurized fluid to pass though a check valve along a conduit and drive a vane wheel by releasing its potential energy. The vane wheel in turn drives a generator to generate electric energy, and the vibration of the vehicles is alleviated by cushion effect provided by the apparatus.

Abstract: An on-road energy conversion and vibration absorber apparatus receives the kinetic energy from moving vehicles and pedestrians when being weighed down, and converts the received kinetic energy into a static energy using a restorable elastic element compressing a fluid thereby storing the static energy in a pressure chamber, and then conducting the pressurized fluid to pass though a check valve along a conduit and drive a vane wheel by releasing its static energy. The vane wheel in turn drives a generator to generate electric energy, the vibration of the vehicles is alleviated by cushion effect provided by the apparatus.