Abstract: An electromagnetic micro-pump includes a substrate, a top plate, a magnetic diaphragm, and a coil unit. The substrate includes a first face and a second face. The first face includes a groove. The top plate is mounted on the first face of the substrate. The top plate includes an input hole, an output hole, and a through-hole. Each of the input hole, the output hole, and the through-hole extends through the top plate and is in communication with the groove. The through-hole is between the input hole and the output hole. The magnetic diaphragm is elastically deformable and mounted to an outer face of the top plate to seal the through-hole. The coil unit is mounted to the second face of the substrate and aligned with the through-hole.

Abstract: An electromagnetic micro-pump includes a substrate, a top plate, a magnetic diaphragm, and a coil unit. The substrate includes a first face and a second face. The first face includes a groove. The top plate is mounted on the first face of the substrate. The top plate includes an input hole, an output hole, and a through-hole. Each of the input hole, the output hole, and the through-hole extends through the top plate and is in communication with the groove. The through-hole is between the input hole and the output hole. The magnetic diaphragm is elastically deformable and mounted to an outer face of the top plate to seal the through-hole. The coil unit is mounted to the second face of the substrate and aligned with the through-hole.

Abstract: A seal includes an annular main member. A seal lip is projected inwards from the annular main member, wherein the seal lip has a tip and an outer inclined surface a plurality of helixes are projected from the outer inclined surface of the seal lip, each of which has a first extending section along a first direction and a second extending section along a second direction connected to the first extending section. The first extending section has a first free end and the second extending section has a second free end, and a junction of the first extending section and the second extending section is a turning point. A first angle is between each of the first directions and a corresponding tangent line of the tip, and a second angle is between each of the first direction and the second direction.

Abstract: A valveless micro impedance pump including a bottom layer, a middle layer, a top layer and a piezoelectric element. The middle layer and the top layer are sealed to form the water inlets/outlets, flow way, upper and lower vibration membranes and boss of the micropump. The piezoelectric element is fixed on the boss and the fixing seat. By means of the electric field effect, the upper and lower vibration membranes are pushed by the piezoelectric element through the boss. The medium within the flow way is squeezed to flow toward the water inlets/outlets on two sides. The upper and lower vibration membranes have different structures. Also, the hardness of the fixing seat is different from the hardness of the bottom layer. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted.