Patents by Inventor Chiho HARAYAMA

Chiho HARAYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treating apparatus
    Patent number: 11114316
    Abstract: Disclosed is a substrate treating apparatus that treats a substrate with processing liquids. The apparatus includes a substrate holder, an exterior cup, and an interior cup. The interior cup includes an interior cup body, and an interior cup outlet. The exterior cup includes an exterior cup body, an exterior bottom cup, a first drain outlet, a first exhaust port, a second drain outlet, a second exhaust port, and a separation partition. The apparatus further includes an annular member movable upwardly/downwardly, and a drive unit that causes the annular member to move to shift the interior cup body between a collecting position and a retracting position.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: September 7, 2021
    Inventors: Kota Kabune, Masahito Kashiyama, Yasuo Takahashi, Koji Nishiyama, Chiho Harayama
  • SUBSTRATE TREATING APPARATUS
    Publication number: 20180025921
    Abstract: Disclosed is a substrate treating apparatus that treats a substrate with processing liquids. The apparatus includes a substrate holder, an exterior cup, and an interior cup. The interior cup includes an interior cup body, and an interior cup outlet. The exterior cup includes an exterior cup body, an exterior bottom cup, a first drain outlet, a first exhaust port, a second drain outlet, a second exhaust port, and a separation partition. The apparatus further includes an annular member movable upwardly/downwardly, and a drive unit that causes the annular member to move to shift the interior cup body between a collecting position and a retracting position.
    Type: Application
    Filed: July 19, 2017
    Publication date: January 25, 2018
    Inventors: Kota KABUNE, Masahito KASHIYAMA, Yasuo TAKAHASHI, Koji NISHIYAMA, Chiho HARAYAMA