Patents by Inventor Chihyueh Lee

Chihyueh Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR IMPROVING HSS CMP PERFORMANCE
    Publication number: 20060157450
    Abstract: Disclosed is a method for improving HSS CMP performance. After performing a HSS CMP process for a predetermined time, DI water is introduced and the polishing process is continued, so that the CMP rate and performance can be improved.
    Type: Application
    Filed: January 20, 2005
    Publication date: July 20, 2006
    Inventors: Hsin-Kun CHU, Teng-Chun Tsai, Kai-Gin Yang, Chihyueh Lee