Patents by Inventor Chikako Koyama

Chikako Koyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light transmitting member, polishing pad, and substrate polishing apparatus
    Patent number: 11673224
    Abstract: Disclosed is a light transmitting member for a polishing pad. The light transmitting member has a cylindrical or truncated conical shape, and a screw thread is formed on a side portion thereof. A polishing pad includes such a light transmitting member and a substrate polishing apparatus includes such a polishing pad.
    Type: Grant
    Filed: May 7, 2019
    Date of Patent: June 13, 2023
    Assignee: EBARA CORPORATION
    Inventors: Masaki Kinoshita, Sachiko Takeda, Chikako Koyama
  • LIGHT TRANSMITTING MEMBER, POLISHING PAD, AND SUBSTRATE POLISHING APPARATUS
    Publication number: 20190344399
    Abstract: Disclosed is a light transmitting member for a polishing pad. The light transmitting member has a cylindrical or truncated conical shape, and a screw thread is formed on a side portion thereof. A polishing pad includes such a light transmitting member and a substrate polishing apparatus includes such a polishing pad.
    Type: Application
    Filed: May 7, 2019
    Publication date: November 14, 2019
    Inventors: Masaki Kinoshita, Sachiko Takeda, Chikako Koyama