Abstract: An ultrasonic element includes: a substrate having a vibration region and a non-vibration region surrounding the vibration region; a first electrode disposed inside the vibration region; a piezoelectric body disposed on the substrate to cover the first electrode; and a second electrode provided on the piezoelectric body, in which a direction in which the substrate, the first electrode, the piezoelectric body, and the second electrode are stacked is a stacking direction, and a thickness of the substrate along the stacking direction is 2.0 ?m or more and 10.0 ?m or less.

Abstract: An acoustic wave device includes a base having a hollow, an acoustic wave element provided at a position corresponding to the hollow of the base and generating acoustic waves, and a cap provided on a surface of the base opposite to a surface on which the acoustic wave element is provided and closing the hollow, wherein the cap has a first surface facing the hollow and a second surface located on a side opposite to the hollow in a front and back relationship with each other, and a hole that opens to the first surface and extends toward the second surface, a width of the hole is smaller than a width of the acoustic wave element, and the hole does not penetrate the cap.

Abstract: A piezoelectric device includes: a substrate having a vibrating region and a non-vibrating region that surrounds the vibrating region; a first electrode provided across the vibrating region and the non-vibrating region; a second electrode disposed in the vibrating region to be separate from the first electrode; a piezoelectric body provided across the substrate, the first electrode, and the second electrode; and a third electrode that is disposed on the piezoelectric body and overlaps with at least the first electrode and the second electrode in the vibrating region when viewed in a thickness direction of the substrate.

Abstract: A fluid device 10 includes: a flow path 20 through which a fluid containing a fine particle flows; an ultrasonic transmitter 60 configured to transmit an ultrasonic wave to the fluid in the flow path 20 in response to an input of a drive signal; a flow velocity measurement unit 40 configured to measure a flow velocity of the fluid in the flow path 20; and a controller 70 configured to control the ultrasonic transmitter 60. The controller 70 sets an amplitude of the drive signal according to a measured flow velocity that is a flow velocity measured by the flow velocity measurement unit 40, and inputs the drive signal having the set amplitude to the ultrasonic transmitter 60.

Abstract: An ultrasonic sensor includes: a substrate having a first surface and a second surface at an opposite side from the first surface, the substrate having an opening penetrating the substrate from the first surface to the second surface; a vibration plate covering a first surface side of the opening; piezoelectric elements provided at a surface of the vibration plate at an opposite side from the opening and each including a first electrode, a piezoelectric layer, and a second electrode; and an elastic layer in contact with the vibration plate in the opening, in which a portion in which the first electrode, the piezoelectric layer, and the second electrode overlap is defined as an active portion, and a plurality of the active portions face the one opening, and a thickness of the elastic layer is equal to or larger than half a thickness of the substrate and less than the thickness of the substrate, and the thickness of the elastic layer in each of the active portions is uniform.

Abstract: A liquid ejection device 1 includes a head 10 including at least one nozzle 11 that ejects ejection liquid; a cap 20 that covers the nozzle 11 and that holds cleaning liquid 23 therein; and an ultrasonic device 25 that transmits ultrasonic waves 24 to the cleaning liquid 23, wherein the cleaning liquid 23 contacts the at least one nozzle 11 and the ultrasonic device 25 is arranged so as to be in contact with the cleaning liquid 23 in the cap 20.

Abstract: A fluidic device 10 includes: a channel 20 that extends along an X axis and through which a fluid S flows; a standing wave generation part 30 that generates a standing wave SW transmitting along a Y axis in the fluid S in the channel 20; a transmission and reception part 40 that transmits an ultrasonic wave to the fluid S in the channel 20 and receives the ultrasonic wave transmitted through the fluid S; a time-of-flight measurement unit 55 that measures a time of flight that is a period of time from when the transmission and reception part 40 transmits the ultrasonic wave to when the transmission and reception part 40 receives the ultrasonic wave; and a drive control unit 582 that controls driving of the standing wave generation part 30 based on the time of flight of the ultrasonic wave.

Abstract: A liquid ejection device includes an ejection head including a nozzle plate having a first surface in which a plurality of nozzles are provided and a liquid supply path configured to supply liquid to the plurality of nozzles; a storage case facing the first surface of the nozzle plate; and an ultrasonic generator that is provided in the storage case and that is configured to generate ultrasonic waves, wherein the ultrasonic generator is configured to, by the ultrasonic waves propagated to the nozzle plate through the storage case, generate standing waves inside the plurality of nozzles.

Abstract: A liquid ejection device including an ejection head that ejects a liquid, a liquid supply flow path that supplies the liquid to the ejection head, an ultrasonic generator provided with an ultrasonic element that transmits ultrasonic waves in a first direction that intersects with a flow direction of the liquid in the liquid supply flow path, and a branch flow path that branches in a second direction that intersects the flow direction and the first direction from a position of the liquid supply flow path where the ultrasonic waves are transmitted, wherein the ultrasonic generator that generates a gradient of acoustic radiation force in which the acoustic radiation force increases from the liquid supply flow path toward the branch flow path.

Abstract: An ultrasound probe includes: an ultrasound device configured to perform at least one of transmission and reception of an ultrasound wave; and a case housing the ultrasound device. The ultrasound device includes a vibration plate and a piezoelectric element disposed at the vibration plate. The case is provided with an opening facing the vibration plate, and a first communication hole that is provided at a position different from a position of the opening and that communicates an internal space of the case with outside of the case. The case includes a sealing mechanism configured to prevent entry of a water droplet from the opening into the internal space.

Abstract: A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave application device including an ultrasonic element that transmits an ultrasonic wave, in which the flow path has, as flow path wall surfaces, an ultrasonic wave application surface that applies, to the fluid, the ultrasonic wave transmitted from the ultrasonic element, and a reflection surface that reflects the ultrasonic wave applied to the fluid from the ultrasonic wave application surface, and the reflection surface has a concave curved surface shape.

Abstract: A fluid device includes a flow path through which a fluid flows, and an ultrasonic element that transmits an ultrasonic wave to the fluid to generate a standing wave in the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic element includes a vibrator having a fluid contact surface that comes into contact with the fluid, and a piezoelectric element that is provided at the vibrator and that flexurally vibrates the vibrator in a normal direction of the fluid contact surface. When a thickness of the vibrator in the normal direction is t, a sound velocity of a medium of the fluid is C, an average sound velocity of a longitudinal wave transmitted in the vibrator is C?, a dimension of the flow path in the first direction is L, and a mode order of the standing wave is n, the following expression is satisfied.

Abstract: An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in

Abstract: A piezoelectric device includes a substrate that includes an opening; a diaphragm that includes a first surface and a second surface opposite to the first surface, and that is configured such that the first surface is bonded to the substrate to close the opening; and a piezoelectric element provided on the second surface of the diaphragm, wherein the diaphragm includes a first region overlapping with the piezoelectric element and a second region not overlapping with the piezoelectric element when viewed from a thickness direction of the diaphragm, a thickness of the second region is thinner than a thickness of the first region, the second region is provided with a reinforcement material having a fracture toughness higher than that of the first region of the diaphragm, and the thickness of the second region in the thickness direction is constant, and a thickness of the reinforcement material is constant.

Abstract: A mounting structure includes: a first substrate that has a first surface on which a functional element is provided; a wiring portion that is provided at a position, which is different from a position of the functional element on the first surface, and is conductively connected to the functional element; a second substrate that has a second surface that is opposite to the first surface; and a conduction portion that is provided on the second surface, is connected to the wiring portion, and is conductively connected the functional element. The shortest distance between the functional element and the second substrate is longer than the longest distance between the second substrate and a position where the wiring portion is connected to the conduction portion.

Abstract: An ultrasonic device includes a substrate, a transmitter provided at the substrate and configured to transmit an ultrasonic wave to an object, and a receiver provided at a position different from the transmitter at the substrate and configured to receive an ultrasonic wave reflected by the object. A resonance frequency of the transmitter is higher than a resonance frequency of the receiver. An anti-resonance frequency of the receiver is included in a predetermined frequency band including the resonance frequency of the transmitter.

Abstract: A mounting structure includes: a first substrate that has a first surface on which a functional element is provided; a wiring portion that is provided at a position, which is different from a position of the functional element on the first surface, and is conductively connected to the functional element; a second substrate that has a second surface that is opposite to the first surface; and a conduction portion that is provided on the second surface, is connected to the wiring portion, and is conductively connected the functional element. The shortest distance between the functional element and the second substrate is longer than the longest distance between the second substrate and a position where the wiring portion is connected to the conduction portion.

Abstract: A fluidic device that uses ultrasonic waves to trap microparticles contained in a fluid, the fluidic device includes: a body having a flow path through which the fluid flows and an ultrasonic element provided on a flow path wall forming the flow path of the body and configured to transmit ultrasonic waves in first direction to form a standing wave in the flow path, wherein the body has, with a portion where the ultrasonic element is arranged as a trapping section, an inflow section configured to cause the fluid to flow into the trapping section along a second direction intersects with the first direction, a first outflow section through which concentrated fluid containing microparticles trapped by the standing wave flows out from the trapping section, and a second outflow section through which diluted fluid having a concentration of the microparticles lower than that of the concentrated fluid flows out from the trapping section, the inflow section is provided at a negative side of the trapping section in the

Abstract: A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave transmitter configured to transmit an ultrasonic wave to generate a standing wave to the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic wave transmitter is in contact with the fluid and faces an antinode region corresponding to any antinode in the standing wave.

Abstract: A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.