Patents by Inventor Chikara Tokida

Chikara Tokida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate positioning device and substrate positioning method
    Patent number: 7973300
    Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.
    Type: Grant
    Filed: April 30, 2010
    Date of Patent: July 5, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Hiroyuki Takahashi, Chikara Tokida
  • SUBSTRATE POSITIONING DEVICE AND SUBSTRATE POSITIONING METHOD
    Publication number: 20100228371
    Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.
    Type: Application
    Filed: April 30, 2010
    Publication date: September 9, 2010
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hiroyuki TAKAHASHI, Chikara TOKIDA
  • Substrate positioning device and substrate positioning method for a substrate having a transparent layer and a nontransparent layer
    Patent number: 7737426
    Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.
    Type: Grant
    Filed: December 28, 2007
    Date of Patent: June 15, 2010
    Assignee: Tokyo Electron Limited
    Inventors: Hiroyuki Takahashi, Chikara Tokida
  • SUBSTRATE POSITIONING DEVICE AND SUBSTRATE POSITIONING METHOD
    Publication number: 20080181752
    Abstract: It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.
    Type: Application
    Filed: December 28, 2007
    Publication date: July 31, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Hiroyuki TAKAHASHI, Chikara TOKIDA