Abstract: A FinFET device structure and method for forming the same are provided. The FinFET device structure includes a first, second, third and fourth fin structures over a substrate. The first and the second fin structures have a first and a second sidewall surfaces respectively. The third and the fourth fin structure have a third and a fourth sidewall surfaces respectively. The first and the second sidewall surfaces extend along a first direction. The third and the fourth sidewall surfaces extend along a second direction different from the first direction. A first and a second isolation structures are over the substrate and surrounding the first and the second fin structure and surrounding the third and the fourth fin structures respectively. A distance between top portions of the third and the fourth sidewall surfaces is greater than that between top portions of the first and the second sidewall surfaces.

Abstract: A micro-fluidic oscillator comprises a main body and a cover body for covering the main body. An oscillation chamber is disposed on the main body to provide an oscillation space for fluid. A sudden-expansion micro-nozzle is connected with one end of the oscillation chamber, and an outlet passage is connected with the other end of the oscillation chamber. Two fluid-separating bodies are located at the connection positions of the outlet passage and the oscillation chamber, respectively. Two feedback channels are located outside two attachment walls. The sudden-expansion micro-nozzle is used to break the viscous shear stress between fluid and the walls and to generate unstable flow and oscillation. Moreover, the two feedback channels have different lengths, inside diameters and alternate outlet positions to further enhance the oscillation of fluid.

Abstract: A micro-fluidic oscillator comprises a main body and a cover body for covering the main body. An oscillation chamber is disposed on the main body to provide an oscillation space for fluid. A sudden-expansion micro-nozzle is connected with one end of the oscillation chamber, and an outlet passage is connected with the other end of the oscillation chamber. Two fluid-separating bodies are located at the connection positions of the outlet passage and the oscillation chamber, respectively. Two feedback channels are located outside two attachment walls. The sudden-expansion micro-nozzle is used to break the viscous shear stress between fluid and the walls and to generate unstable flow and oscillation. Moreover, the two feedback channels have different lengths, inside diameters and alternate outlet positions to further enhance the oscillation of fluid.