Patents by Inventor Chin-Chang Huang

Chin-Chang Huang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11939664
    Abstract: A semiconductor process system includes a process chamber. The process chamber includes a wafer support configured to support a wafer. The system includes a bell jar configured to be positioned over the wafer during a semiconductor process. The interior surface of the bell jar is coated with a rough coating. The rough coating can include zirconium.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: March 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Meng-Chun Hsieh, Tsung-Yu Tsai, Hsing-Yuan Huang, Chih-Chang Wu, Szu-Hua Wu, Chin-Szu Lee
  • Publication number: 20230057823
    Abstract: The present application relates to a dispatch method for a production line in a semiconductor process, a storage medium and a semiconductor device. The dispatch method for a production line in a semiconductor process can acquire an overlay error reference curve of a product lot to be exposed in equipment and set an overlay error range according to the overlay error reference curve. At the end of exposure, an overlay error for the product lot to be exposed can be acquired, and it can be determined whether the overlay error falls into the overlay error range. If the overlay error for the product lot to be exposed does not fall into the overlay error range, the product lot to be exposed can be continuously machined by this equipment.
    Type: Application
    Filed: May 26, 2021
    Publication date: February 23, 2023
    Inventor: CHIN-CHANG HUANG
  • Publication number: 20220404102
    Abstract: A vapor chamber having an adhering configuration and a manufacturing method thereof are provided. The manufacturing method includes: a dispensing step implemented by forming a ring-shaped adhesive onto an inner surface of a first metallic sheet; a filling step implemented by filling a working liquid in a space jointly defined by the inner surface of the first metallic sheet and the ring-shaped adhesive; a bonding step implemented by bonding the first metallic sheet and a second metallic sheet together in a vacuum chamber through the ring-shaped adhesive, so as to form a semi-finished product that defines an enclosed thermal flow space therein, in which the working liquid is arranged in the thermal flow space; and a solidifying step implemented by placing the semi-finished product in a solidifying environment so as to solidify the ring-shaped adhesive to form a sealing frame.
    Type: Application
    Filed: May 26, 2022
    Publication date: December 22, 2022
    Inventors: CHIN-CHANG HUANG, CHUN-CHIEH LU, CHI-KANG TSAI
  • Publication number: 20180099305
    Abstract: The present invention provides a liquid level control system and method. The present invention achieves a uniformly soaking process of a substrate during different segments of a fixed time period, by using a liquid removal device to gradually remove a processing liquid from a tank. The substrate is disposed in the liquid in the tank to be wet processed. By the removal of the liquid from the tank via the liquid removal device, an area of the portion of the substrate being processed by the liquid can be gradually decreased whereby the substrate can be uniformly processed.
    Type: Application
    Filed: December 30, 2016
    Publication date: April 12, 2018
    Inventors: Jung-Lung HUANG, Chin-Chang HUANG, Ying-Ju CHEN
  • Patent number: 9228820
    Abstract: A straightness measuring instrument includes a base, two loading units, a center clamping apparatus, and a measure apparatus. The base includes two support rods and a sliding rod. The loading units are mounted on the base and are arranged along an axial direction of the support rods at intervals. The center clamping apparatus is mounted in the base and includes a fixed seat and a movable seat. The measure apparatus is mounted movably around the sliding rod. The loading units are adjustable for easy and quick movement depending on the length of a workpiece. Also, the center clamping apparatus can assist with clamping the workpiece that has different diameters.
    Type: Grant
    Filed: February 11, 2014
    Date of Patent: January 5, 2016
    Inventor: Chin-Chang Huang
  • Publication number: 20150226536
    Abstract: A straightness measuring instrument includes a base, two loading units, a center clamping apparatus, and a measure apparatus. The base includes two support rods and a sliding rod. The loading units are mounted on the base and are arranged along an axial direction of the support rods at intervals. The center clamping apparatus is mounted in the base and includes a fixed seat and a movable seat. The measure apparatus is mounted movably around the sliding rod. The loading units are adjustable for easy and quick movement depending on the length of a workpiece. Also, the center clamping apparatus can assist with clamping the workpiece that has different diameters.
    Type: Application
    Filed: February 11, 2014
    Publication date: August 13, 2015
    Inventor: Chin-Chang HUANG
  • Publication number: 20070099450
    Abstract: A signal switching (distributing) box structure comprises an upper housing and lower housing, the internal portion thereof is allowed to form a receiving space through the combination of the upper housing and the lower housing. At least one side of the lower housing is provided with at least one receiving hole for receiving a head of each adaptor and the rear end of the receiving hole is connected with a fixing sheet inside the lower housing. Positioning holes corresponding to the receiving holes are disposed on the fixing sheet to allow the heads of the adaptors to be locked through the disposition of the positioning holes, two side of the fixing sheet are respectively disposed with one fixing rod; the fixing sheet is allowed to fix on the lower housing through the disposition of the fixing rods. The heads of the adaptors are completely received in the receiving holes to enable them not to be exposed outside the outer rim of the housing when the head of the adaptor is locked on the fixing sheet.
    Type: Application
    Filed: October 26, 2006
    Publication date: May 3, 2007
    Inventor: Chin-Chang Huang
  • Publication number: 20060236717
    Abstract: The present invention discloses a heat dissipating system and device. The heat dissipating system includes a compressor having two pipelines; a heat dissipating for connecting a first combining tube of one of the two pipelines from the compressor, a plurality of heat dissipating fins disposed between the first combining tube and a second combining tube with the same shape of the first combining tube for defining a multilayer channel with the internal sides of the first and second combining tubes, two pipelines connected externally and separately to the second combining tube; an expansion valve; and an evaporator. The compressor is used for dispersing the heat of a conductive medium of a cooling fluid to conduct the heat of a heat source and lower the temperature of the heat source, so as to enhance the heat dissipation and performance of the heat dissipating system.
    Type: Application
    Filed: April 20, 2005
    Publication date: October 26, 2006
    Inventor: Chin-Chang Huang
  • Patent number: 5341253
    Abstract: An extended circuit of a HiFi KARAOKE VCR having a simultaneous singing and recording function, wherein an audio erasing head (AE head) on the KARAOKE VCR is used to erase the sound on a normal track of a HiFi KARAOKE program tape and then use the audio control head (A/C head) on the VCR to record the user's desired sound, also stereo, left (L), right (R) or normal sound may be chosen by using an audio select switch on the HiFi VCR. While a tape recorded plays, once the audio select switch selects a normal channel position, the sound recorded on the program tape and the original accompaniment sound of said program tape may be heard.
    Type: Grant
    Filed: November 28, 1992
    Date of Patent: August 23, 1994
    Assignee: Tatung Co.
    Inventors: Pohsien Liao, Chin-Chang Huang, Jye-Huei Wang