Abstract: This prevent disclosure provides a plasma enhanced atomic layer deposition apparatus and the controlling method thereof. The plasma enhanced atomic layer deposition apparatus includes: a plurality of reaction chambers, each of the reaction chambers having a first reaction space and a second reaction space; an adjustable partition unit controlled to separate or communicate the first and the second reaction spaces; and a plurality of heating carriers respectively disposed in the plurality of reaction chambers. The method manipulates the movement of the partition plate, leading to separation or communication between the first and second reaction spaces, so as to avoid the interference or inter-reaction between process gases and the resultant particles contaminating the substrates.

Abstract: The present invention provides an apparatus with surface information displaying, wherein a skin unit comprising a flexible display is covered on the surface of a moving object of the apparatus such that the surface of the apparatus is capable of displaying the information such us color, pattern or text immediately by software control. Meanwhile, the flexible display further has a layer of tactile sensing unit for detecting input of interacting signal. In addition, the moving object further integrates an environmental sensing device, an information identifying device or a combination of both and uses the environmental status, text information or audio/video, which are generated from the environmental sensing device or information identifying device, as an input signal through cable or wireless technology so as to generate responsive action through the flexible display or mechanism of the apparatus so that interactivities of the apparatus can be increased.

Abstract: The present invention provides a tactile sensing device comprising a tactile sensing layer, a pressure adjusting unit, at least one pressure sensing unit and a control unit. The tactile sensing layer includes a plurality of elastic elements, each of which has an inner space. The pressure adjusting unit coupled to the tactile sensing layer functions to provide and control variation of the pressure in the inner space of each elastic element. The control unit is coupled to the air supply unit and the at least one pressure sensing unit. The control unit is capable of receiving sensing signal from the at least one pressure sensing unit. In addition, the present invention also provides an apparatus whose surface is covered by the tactile sensing device. With the foregoing disclosure, it is capable of detecting the location and magnitude of the force acted on the tactile sensing device disposed on the surface of the apparatus through sensing the variation of pressure occurred in the elastic elements.

Abstract: A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.

Abstract: A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.

Abstract: A brittle material rotating and aligning mechanism including a bearing, a rotary table, and a driving mechanismU, and installed in the worktable of a brittle material scribing and breaking apparatus; carries brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for low installation cost, no requirement for a precision adjustment during installation, and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.

Abstract: A brittle material rotating and aligning mechanism comprising a bearing, a rotary table and a driving mechanism and installed in the worktable of a brittle material scribing and breaking apparatus is disclosed to carry a brittle material, for example, a semiconductor wafer for scribing and breaking into individual dies. The driving mechanism uses a flexible transmission member to rotate the rotary table for the advantages of low installation cost and no requirement for a precision adjustment during installation and, preventing the occurrence of back lash or the production of particles due to friction between the transmission member and the driving wheel of the driving mechanism, or between the transmission member and the rotary table.