Patents by Inventor Chin Fong Lee

Chin Fong Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum pump controller
    Patent number: 9411341
    Abstract: A vacuum pump controller and a method of making a devise using the same are presented. The vacuum pump controller comprises detectors for detecting whether a cassette is present in a semiconductor processing load lock; and controllers for sending control signals to a vacuum pump to control the speed voltage of the vacuum pump. The vacuum pump controller may further send control signals to control the supply of N2/H2 gas, cooling water and other vacuum pump accessories.
    Type: Grant
    Filed: May 23, 2013
    Date of Patent: August 9, 2016
    Inventors: Chin Fong Lee, Ming Zhu, Chuin Boon Yeap
  • VACUUM PUMP CONTROLLER
    Publication number: 20130317640
    Abstract: A vacuum pump controller and a method of making a devise using the same are presented. The vacuum pump controller comprises detectors for detecting whether a cassette is present in a semiconductor processing load lock; and controllers for sending control signals to a vacuum pump to control the speed voltage of the vacuum pump. The vacuum pump controller may further send control signals to control the supply of N2/H2 gas, cooling water and other vacuum pump accessories.
    Type: Application
    Filed: May 23, 2013
    Publication date: November 28, 2013
    Inventors: Chin Fong LEE, Ming ZHU, Chuin Boon YEAP
  • Clamping ring design to reduce wafer sticking problem in metal deposition
    Patent number: 6162336
    Abstract: A clamping ring design that eliminates the Wafer sticking problem. In the first embodiment of the present invention the wafer clamp ring is redesigned to sharply reduce the wafer to wafer-ring contact area. In the second embodiment of the present invention a clamp ring guide is added to prolong the lifetime of the clamp ring.
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: December 19, 2000
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventor: Chin Fong Lee