Patents by Inventor Chin-Kai Chang

Chin-Kai Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240145292
    Abstract: A single wafer spin cleaning apparatus with soaking, cleaning, and etching functions in accordance with the present invention includes a spin driver device, a wafer spin chuck, and a wafer support disk. The wafer spin chuck is driven by the spin driver device to spin. The wafer support disk is annular and surrounds the wafer spin chuck, can act relative to the wafer spin chuck to a wafer support position or a wafer disengagement position, and includes a soaking trough. The wafer support disk at the wafer support position can support a wafer such that the wafer is soaked in processing liquid injected in the soaking trough for implementing a high efficient cleaning or etching process.
    Type: Application
    Filed: February 2, 2023
    Publication date: May 2, 2024
    Inventors: Li-tso HUANG, Hsiu-kai CHANG, Chin-yuan WU, Ming-che HSU
  • Publication number: 20240105500
    Abstract: The present disclosure provides a method for repairing a seam within a conformally deposited material. One or more seam repairing precursor sources may be delivered to seams or voids using a carrier at a super critical fluid phase. At the super critical fluid phase, the carrier has liquid like density and gas like high diffusion capability, therefore capable of delivering the repairing precursor sources to seams or voids under surfaces of a structure. In some embodiments, carbon dioxide or argon may be used as a carrier.
    Type: Application
    Filed: February 7, 2023
    Publication date: March 28, 2024
    Inventors: Kenichi Sano, Chin-Hsiang Lin, Hsu-Kai Chang, Pinyen Lin
  • Publication number: 20160197211
    Abstract: A method of manufacturing a photoelectric and thermoelectric sensor includes the steps of: preparing a silicon substrate and an etching solution that includes hydrofluoric acid, isopropyl alcohol and deionized water; performing electrochemical etching on the silicon substrate in the etching solution to obtain a porous silicon substrate; and forming on the porous silicon substrate an electrode unit that is connected to the porous silicon substrate and that is adapted for being connected to an external circuit.
    Type: Application
    Filed: August 5, 2015
    Publication date: July 7, 2016
    Inventors: Kuei-Sen HSIAO, Chao-Yang TSAI, Sheng-Lin CHENG, Chin-Kai CHANG
  • Publication number: 20160185047
    Abstract: A three dimensional (3D) printing device or apparatus includes a housing, a rotatable surface contained within the housing that is configured to rotate in a substantially horizontal plane relative to a bottom surface of the housing. The 3D printing device further includes a vertical track in communication with the rotatable surface that guides the rotatable surface when the rotatable surface moves in a direction perpendicular to the substantially horizontal plane, a scanning module, including a camera and a laser, a printer head configured to deposit one or more layers of printing material on the rotatable surface, and a printer carriage configured to guide the printer head when the printer head deposits the one or more layers of printing material.
    Type: Application
    Filed: August 19, 2014
    Publication date: June 30, 2016
    Inventors: Jens WINDAU, Chin-Kai CHANG, Christian SIAGIAN
  • Publication number: 20150110967
    Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.
    Type: Application
    Filed: December 23, 2014
    Publication date: April 23, 2015
    Inventors: Hui-Lung KUO, Mei-Chih PENG, Yi-Ping HSIEH, Chin-Kai CHANG
  • Patent number: 8947620
    Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.
    Type: Grant
    Filed: October 28, 2011
    Date of Patent: February 3, 2015
    Assignee: Industrial Technology Research Institute
    Inventors: Hui-Lung Kuo, Mei-Chih Peng, Yi-Ping Hsieh, Chin-Kai Chang
  • Patent number: 8734723
    Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: May 27, 2014
    Assignee: Industrial Technology Research Institute
    Inventors: Chin-Kai Chang, Hui-Lung Kuo
  • Publication number: 20140004004
    Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.
    Type: Application
    Filed: August 30, 2013
    Publication date: January 2, 2014
    Applicant: Industrial Technology Research Institute
    Inventors: Chin-Kai Chang, Hui-Lung Kuo
  • Patent number: 8531082
    Abstract: An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: September 10, 2013
    Assignees: Industrial Technology Research Institute, Yen Tjing Ling Industrial Research Institute, National Taiwan University
    Inventors: Chih-Kung Lee, Chin-Kai Chang, Kuan-Ting Chen, Hui-Lung Kuo, Wen-Jong Wu
  • Publication number: 20130078151
    Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.
    Type: Application
    Filed: January 11, 2012
    Publication date: March 28, 2013
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chin-Kai Chang, Hui-Lung Kuo
  • Publication number: 20120169960
    Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.
    Type: Application
    Filed: October 28, 2011
    Publication date: July 5, 2012
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Hui-Lung Kuo, Mei-Chih Peng, Yi-Ping Hsieh, Chin-Kai Chang
  • Publication number: 20120049693
    Abstract: An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.
    Type: Application
    Filed: August 15, 2011
    Publication date: March 1, 2012
    Applicants: YEN TJING LING INDUSTRIAL RESEARCH INSTITUTE, NATIONAL TAIWAN UNIVERSITY, INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Kung Lee, Chin-Kai Chang, Kuan-Ting Chen, Hui-Lung Kuo, Wen-Jong Wu
  • Patent number: 7957250
    Abstract: A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.
    Type: Grant
    Filed: December 20, 2007
    Date of Patent: June 7, 2011
    Assignees: Industrial Technology Research Institute, National Taiwan University
    Inventors: Chih-Kung Lee, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang, Chih-Hao Chen, Chau-Shioung Yeh, You-Chia Chang
  • Publication number: 20110036818
    Abstract: An optical etching device for laser machining is provided and includes a laser light source and an optical head. The laser light source emits an incident beam. The optical head includes a transparent substrate, an opaque film and a sub-wavelength annular channel. The laser energy tolerance of the transparent substrate ranges from 8 J/cm2 to 12 J/cm2. The opaque film has a first surface and a second surface opposite to the first surface. The transparent substrate is adhered to the first surface. The sub-wavelength annular channel is formed in the opaque film and extends from the first surface to the second surface so that the incident beam from the transparent substrate generates a surface plasma wave on the opaque film.
    Type: Application
    Filed: May 5, 2010
    Publication date: February 17, 2011
    Applicant: NATIONAL TAIWAN UNIVERSITY
    Inventors: Chih-Kung Lee, Jyi-Tyan Yeh, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang
  • Publication number: 20080304397
    Abstract: A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.
    Type: Application
    Filed: December 20, 2007
    Publication date: December 11, 2008
    Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, NATIONAL TAIWAN UNIVERSITY
    Inventors: Chih-Kung Lee, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang, Chih-Hao Chen, Chau-Shioung Yeh, You-Chia Chang