Patents by Inventor Chin-Kai Chang
Chin-Kai Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240145292Abstract: A single wafer spin cleaning apparatus with soaking, cleaning, and etching functions in accordance with the present invention includes a spin driver device, a wafer spin chuck, and a wafer support disk. The wafer spin chuck is driven by the spin driver device to spin. The wafer support disk is annular and surrounds the wafer spin chuck, can act relative to the wafer spin chuck to a wafer support position or a wafer disengagement position, and includes a soaking trough. The wafer support disk at the wafer support position can support a wafer such that the wafer is soaked in processing liquid injected in the soaking trough for implementing a high efficient cleaning or etching process.Type: ApplicationFiled: February 2, 2023Publication date: May 2, 2024Inventors: Li-tso HUANG, Hsiu-kai CHANG, Chin-yuan WU, Ming-che HSU
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Publication number: 20240105500Abstract: The present disclosure provides a method for repairing a seam within a conformally deposited material. One or more seam repairing precursor sources may be delivered to seams or voids using a carrier at a super critical fluid phase. At the super critical fluid phase, the carrier has liquid like density and gas like high diffusion capability, therefore capable of delivering the repairing precursor sources to seams or voids under surfaces of a structure. In some embodiments, carbon dioxide or argon may be used as a carrier.Type: ApplicationFiled: February 7, 2023Publication date: March 28, 2024Inventors: Kenichi Sano, Chin-Hsiang Lin, Hsu-Kai Chang, Pinyen Lin
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Publication number: 20160197211Abstract: A method of manufacturing a photoelectric and thermoelectric sensor includes the steps of: preparing a silicon substrate and an etching solution that includes hydrofluoric acid, isopropyl alcohol and deionized water; performing electrochemical etching on the silicon substrate in the etching solution to obtain a porous silicon substrate; and forming on the porous silicon substrate an electrode unit that is connected to the porous silicon substrate and that is adapted for being connected to an external circuit.Type: ApplicationFiled: August 5, 2015Publication date: July 7, 2016Inventors: Kuei-Sen HSIAO, Chao-Yang TSAI, Sheng-Lin CHENG, Chin-Kai CHANG
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Publication number: 20160185047Abstract: A three dimensional (3D) printing device or apparatus includes a housing, a rotatable surface contained within the housing that is configured to rotate in a substantially horizontal plane relative to a bottom surface of the housing. The 3D printing device further includes a vertical track in communication with the rotatable surface that guides the rotatable surface when the rotatable surface moves in a direction perpendicular to the substantially horizontal plane, a scanning module, including a camera and a laser, a printer head configured to deposit one or more layers of printing material on the rotatable surface, and a printer carriage configured to guide the printer head when the printer head deposits the one or more layers of printing material.Type: ApplicationFiled: August 19, 2014Publication date: June 30, 2016Inventors: Jens WINDAU, Chin-Kai CHANG, Christian SIAGIAN
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Publication number: 20150110967Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.Type: ApplicationFiled: December 23, 2014Publication date: April 23, 2015Inventors: Hui-Lung KUO, Mei-Chih PENG, Yi-Ping HSIEH, Chin-Kai CHANG
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Patent number: 8947620Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.Type: GrantFiled: October 28, 2011Date of Patent: February 3, 2015Assignee: Industrial Technology Research InstituteInventors: Hui-Lung Kuo, Mei-Chih Peng, Yi-Ping Hsieh, Chin-Kai Chang
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Patent number: 8734723Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.Type: GrantFiled: August 30, 2013Date of Patent: May 27, 2014Assignee: Industrial Technology Research InstituteInventors: Chin-Kai Chang, Hui-Lung Kuo
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Publication number: 20140004004Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.Type: ApplicationFiled: August 30, 2013Publication date: January 2, 2014Applicant: Industrial Technology Research InstituteInventors: Chin-Kai Chang, Hui-Lung Kuo
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Patent number: 8531082Abstract: An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.Type: GrantFiled: August 15, 2011Date of Patent: September 10, 2013Assignees: Industrial Technology Research Institute, Yen Tjing Ling Industrial Research Institute, National Taiwan UniversityInventors: Chih-Kung Lee, Chin-Kai Chang, Kuan-Ting Chen, Hui-Lung Kuo, Wen-Jong Wu
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Publication number: 20130078151Abstract: A gas sensor cell using a liquid crystal composite material is provided. The gas sensor cell has recovery capability and can be reused. Upon gas adsorption, the liquid crystal composite material has visually detectable color changes and changes in electrical properties to facilitate the measurement of gas concentration from low to high.Type: ApplicationFiled: January 11, 2012Publication date: March 28, 2013Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chin-Kai Chang, Hui-Lung Kuo
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Publication number: 20120169960Abstract: The invention provides a broadband cholesteric liquid crystal film, a method for fabricating the same, a polarization device employing the same, and high light efficiency liquid crystal display employing the same. The cholesteric liquid crystal film is a single-layer liquid crystal material structure, and has a top surface and a bottom surface. Further, the cholesteric liquid crystal film includes a first region, a second region, and a third region, and the first region is adjacent to the top surface of the cholesteric liquid crystal film, the third region is adjacent to the bottom surface of the cholesteric liquid crystal film, and the second region is located between the first and third regions, and the average helical pitch P1 of the first region and the average helical pitch P3 of the third region are both larger than the average helical pitch P2 of the second region.Type: ApplicationFiled: October 28, 2011Publication date: July 5, 2012Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Hui-Lung Kuo, Mei-Chih Peng, Yi-Ping Hsieh, Chin-Kai Chang
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Publication number: 20120049693Abstract: An actuator and a method for using the same are provided. The actuator includes a flexible element and a photoelectric layer. The flexible element includes an elastic layer or a piezoelectric layer. The photoelectric layer is disposed on a side of the flexible element. An electrical characteristic of the photoelectric layer is determined according to an irradiation condition of the photoelectric layer.Type: ApplicationFiled: August 15, 2011Publication date: March 1, 2012Applicants: YEN TJING LING INDUSTRIAL RESEARCH INSTITUTE, NATIONAL TAIWAN UNIVERSITY, INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTEInventors: Chih-Kung Lee, Chin-Kai Chang, Kuan-Ting Chen, Hui-Lung Kuo, Wen-Jong Wu
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Patent number: 7957250Abstract: A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.Type: GrantFiled: December 20, 2007Date of Patent: June 7, 2011Assignees: Industrial Technology Research Institute, National Taiwan UniversityInventors: Chih-Kung Lee, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang, Chih-Hao Chen, Chau-Shioung Yeh, You-Chia Chang
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Publication number: 20110036818Abstract: An optical etching device for laser machining is provided and includes a laser light source and an optical head. The laser light source emits an incident beam. The optical head includes a transparent substrate, an opaque film and a sub-wavelength annular channel. The laser energy tolerance of the transparent substrate ranges from 8 J/cm2 to 12 J/cm2. The opaque film has a first surface and a second surface opposite to the first surface. The transparent substrate is adhered to the first surface. The sub-wavelength annular channel is formed in the opaque film and extends from the first surface to the second surface so that the incident beam from the transparent substrate generates a surface plasma wave on the opaque film.Type: ApplicationFiled: May 5, 2010Publication date: February 17, 2011Applicant: NATIONAL TAIWAN UNIVERSITYInventors: Chih-Kung Lee, Jyi-Tyan Yeh, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang
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Publication number: 20080304397Abstract: A micro optical head is provided, which provides sub-wavelength focusing spot and very long depth of focus. The optical head includes a transparent substrate, an opaque film, and at least one sub-wavelength annular channel. After coherent light transmits the transparent substrate supporting the optical head and passes through the appropriately designed sub-wavelength annular channel, the transmitted light can overcome the diffraction limit, and the transmission energy is improved efficiently. The transmitted light converges after a certain distance behind the optical head and forms a sub-wavelength-scale beam that maintains a very long distance without divergence.Type: ApplicationFiled: December 20, 2007Publication date: December 11, 2008Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, NATIONAL TAIWAN UNIVERSITYInventors: Chih-Kung Lee, Ding-Zheng Lin, Tsung-Dar Cheng, Chin-Kai Chang, Chih-Hao Chen, Chau-Shioung Yeh, You-Chia Chang