Patents by Inventor Chin Lun Chang

Chin Lun Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200051791
    Abstract: The present disclosure describes an exemplary etch process in a reactor that includes a shower head and an electrostatic chuck configured to receive a radio frequency (RF) power. The shower head includes a top plate and a bottom plate with one or more gas channels that receive incoming gases. The method can include (i) rotating the top plate or the bottom plate of the shower head to a first position to allow a gas to flow through the shower head; (ii) performing a surface modification cycle that includes: applying a negative direct current (DC) bias voltage to the shower head, applying an RF power signal to the wafer chuck; and (iii) performing an etching cycle that includes: removing the negative DC bias voltage from the shower head and lowering the RF power signal applied to the wafer chuck.
    Type: Application
    Filed: October 18, 2019
    Publication date: February 13, 2020
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Yu-Chi LIN, Yi-Wei CHIU, Hung-Jui CHANG, Chin-Hsing LIN, Yu-Lun KE
  • Publication number: 20200043740
    Abstract: A method includes mounting a wafer on a chuck disposed within a chamber of an etching system, the wafer being encircled by a focus ring. While etching portions of the wafer, an etch direction is adjusted to a first desired etch direction by adjusting a vertical position of the focus ring relative to the wafer to a first desired vertical position. While etching portions of the wafer, the etch direction is adjusted to a second desired etch direction by adjusting the vertical position of the focus ring relative to the wafer to a second desired vertical position. The second desired vertical position is different from the first desired vertical position. The second desired etch direction is different from the first desired etch direction.
    Type: Application
    Filed: October 7, 2019
    Publication date: February 6, 2020
    Inventors: Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo, Yu Lun Ke
  • Patent number: 10529543
    Abstract: The present disclosure describes an exemplary etch process in a reactor that includes a shower head and an electrostatic chuck configured to receive a radio frequency (RF) power. The shower head includes a top plate and a bottom plate with one or more gas channels that receive incoming gases. The method can include (i) rotating the top plate or the bottom plate of the shower head to a first position to allow a gas to flow through the shower head; (ii) performing a surface modification cycle that includes: applying a negative direct current (DC) bias voltage to the shower head, applying an RF power signal to the wafer chuck; and (iii) performing an etching cycle that includes: removing the negative DC bias voltage from the shower head and lowering the RF power signal applied to the wafer chuck.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: January 7, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang, Chin-Hsing Lin, Yu Lun Ke
  • Publication number: 20190377517
    Abstract: A method for performing writing management in a memory device, the memory device, and the controller thereof are provided. The method may include: writing first partial data of even-page data into a non-volatile (NV) memory; transmitting a first set of commands without a confirmation command to the NV memory, to write the first partial data and second partial data of the even-page data into an internal buffer within the NV memory; transmitting a second set of commands and the confirmation command to the NV memory, to write the first partial data and the second partial data into a block of the NV memory; writing third partial data of odd-page data into the NV memory; and writing the first and the second partial data into an even page of another block of the NV memory, and writing the third and fourth partial data into an odd page of this block.
    Type: Application
    Filed: August 22, 2019
    Publication date: December 12, 2019
    Inventors: Wei-Lun Yan, Ming-Yen Lin, Chin-Pang Chang
  • Patent number: 10504738
    Abstract: A method includes mounting a wafer on a chuck disposed within a chamber of an etching system, the wafer being encircled by a focus ring. While etching portions of the wafer, an etch direction is adjusted to a first desired etch direction by adjusting a vertical position of the focus ring relative to the wafer to a first desired vertical position. While etching portions of the wafer, the etch direction is adjusted to a second desired etch direction by adjusting the vertical position of the focus ring relative to the wafer to a second desired vertical position. The second desired vertical position is different from the first desired vertical position. The second desired etch direction is different from the first desired etch direction.
    Type: Grant
    Filed: April 30, 2018
    Date of Patent: December 10, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo, Yu-Lun Ke
  • Patent number: 10506224
    Abstract: A holographic three dimensional imaging projecting medical apparatus is provided, including: a three dimensional imaging device, having a projecting mechanism and an image forming mechanism, the projecting mechanism including a housing and a projecting unit, the projecting unit projecting a plurality of projected images through the housing to the image forming mechanism, to form a three dimensional image within an image forming space of the image forming mechanism, the housing having a plurality of reflection portions, each of the plurality of reflection portions having a through hole and a plurality of light reflecting sheets disposed around the through hole, the projecting unit attached to the housing; a motion detector, detecting an operating gesture and generating a control signal corresponding to the operating gesture; and a processor, receiving the control signal and controlling the three dimensional image according to the control signal.
    Type: Grant
    Filed: November 7, 2017
    Date of Patent: December 10, 2019
    Assignee: ORIENTAL INSTITUTE OF TECHNOLOGY
    Inventors: Chin-Lun Lai, Yu-Mei Chang
  • Publication number: 20190333784
    Abstract: A method includes mounting a wafer on a chuck disposed within a chamber of an etching system, the wafer being encircled by a focus ring. While etching portions of the wafer, an etch direction is adjusted to a first desired etch direction by adjusting a vertical position of the focus ring relative to the wafer to a first desired vertical position. While etching portions of the wafer, the etch direction is adjusted to a second desired etch direction by adjusting the vertical position of the focus ring relative to the wafer to a second desired vertical position. The second desired vertical position is different from the first desired vertical position. The second desired etch direction is different from the first desired etch direction.
    Type: Application
    Filed: April 30, 2018
    Publication date: October 31, 2019
    Inventors: Yu-Chi Lin, Chin-Hsing Lin, Hung Jui Chang, Yi-Wei Chiu, Yu-Wei Kuo, Yu-Lun Ke
  • Patent number: 10437520
    Abstract: A method for performing writing management in a memory device, the memory device, and the controller thereof are provided. The method may include: writing first partial data of even-page data into a non-volatile (NV) memory; transmitting a first set of commands without a confirmation command to the NV memory, to write the first partial data and second partial data of the even-page data into an internal buffer within the NV memory; transmitting a second set of commands and the confirmation command to the NV memory, to write the first partial data and the second partial data into a block of the NV memory; writing third partial data of odd-page data into the NV memory; and writing the first and the second partial data into an even page of another block of the NV memory, and writing the third and fourth partial data into an odd page of this block.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: October 8, 2019
    Assignee: Silicon Motion Inc.
    Inventors: Wei-Lun Yan, Ming-Yen Lin, Chin-Pang Chang
  • Publication number: 20190235789
    Abstract: A method for performing writing management in a memory device, the memory device, and the controller thereof are provided. The method may include: writing first partial data of even-page data into a non-volatile (NV) memory; transmitting a first set of commands without a confirmation command to the NV memory, to write the first partial data and second partial data of the even-page data into an internal buffer within the NV memory; transmitting a second set of commands and the confirmation command to the NV memory, to write the first partial data and the second partial data into a block of the NV memory; writing third partial data of odd-page data into the NV memory; and writing the first and the second partial data into an even page of another block of the NV memory, and writing the third and fourth partial data into an odd page of this block.
    Type: Application
    Filed: June 20, 2018
    Publication date: August 1, 2019
    Inventors: Wei-Lun Yan, Ming-Yen Lin, Chin-Pang Chang
  • Publication number: 20190148116
    Abstract: The present disclosure describes an exemplary etch process in a reactor that includes a shower head and an electrostatic chuck configured to receive a radio frequency (RF) power. The shower head includes a top plate and a bottom plate with one or more gas channels that receive incoming gases. The method can include (i) rotating the top plate or the bottom plate of the shower head to a first position to allow a gas to flow through the shower head; (ii) performing a surface modification cycle that includes: applying a negative direct current (DC) bias voltage to the shower head, applying an RF power signal to the wafer chuck; and (iii) performing an etching cycle that includes: removing the negative DC bias voltage from the shower head and lowering the RF power signal applied to the wafer chuck.
    Type: Application
    Filed: July 18, 2018
    Publication date: May 16, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Chi LIN, Yi-Wei Chiu, Hung Jui Chang, Chin-Hsing Lin, Yu Lun Ke
  • Publication number: 20190141309
    Abstract: A holographic three dimensional imaging projecting medical apparatus is provided, including: a three dimensional imaging device, having a projecting mechanism and an image forming mechanism, the projecting mechanism including a housing and a projecting unit, the projecting unit projecting a plurality of projected images through the housing to the image forming mechanism, to form a three dimensional image within an image forming space of the image forming mechanism, the housing having a plurality of reflection portions, each of the plurality of reflection portions having a through hole and a plurality of light reflecting sheets disposed around the through hole, the projecting unit attached to the housing; a motion detector, detecting an operating gesture and generating a control signal corresponding to the operating gesture; and a processor, receiving the control signal and controlling the three dimensional image according to the control signal.
    Type: Application
    Filed: November 7, 2017
    Publication date: May 9, 2019
    Inventors: Chin-Lun LAI, Yu-Mei CHANG
  • Publication number: 20150136668
    Abstract: An oil separating apparatus includes a preliminary separator and a main separator. The preliminary separator is for collecting wastewater. The main separator has a main separating chamber, a wastewater exit channel and a communicating channel. The main separating chamber communicates with the preliminary separator, and has upper and lower openings. The communicating channel communicates the wastewater exit channel and the lower opening. A distance between the upper and lower openings ranges from 300 millimeters to 3000 millimeters.
    Type: Application
    Filed: November 13, 2014
    Publication date: May 21, 2015
    Inventor: Chin-Lun Chang
  • Publication number: 20140197668
    Abstract: A massage chair includes: a base unit; a rocker mechanism including an actuator that is coupled to the base unit, at least one output bar that is connected pivotally to the base unit, an input bar that is connected to and that is driven rotatably by the actuator, and a connecting bar that is connected pivotally to the input bar and the output bar; and a seat unit connected immovably to the output bar. The input bar, the output bar, the connecting bar, and the base unit cooperate to constitute a crank-rocker planar four-bar linkage. The actuator actuates rotation of the input bar, which in turn drives reciprocating swing motion of the output bar and the seat unit.
    Type: Application
    Filed: January 15, 2013
    Publication date: July 17, 2014
    Inventor: Chin-Lun Chang
  • Patent number: 7469790
    Abstract: An oil extracting apparatus includes a rigid oil adhering ring having a horizontally disposed ring axis and an oil adhering surface surrounding the ring axis, a driving device coupled to the oil adhering ring for driving rotation of the oil adhering ring about the ring axis, an oil scraping unit, and an oil collecting unit. At least a portion of the oil adhering ring below the ring axis is adapted to be immersed in a water body. Rotation of the oil adhering ring results in separation of the oil from the water body and in adhering of the oil on the oil adhering ring to form an oil film on the oil adhering surface of the oil adhering ring. The oil scraping unit scrapes the oil film from the oil adhering surface of the oil adhering ring. The oil collecting unit collects the oil scraped by the oil scraping unit.
    Type: Grant
    Filed: March 29, 2007
    Date of Patent: December 30, 2008
    Inventor: Chin Lun Chang
  • Publication number: 20080271237
    Abstract: A hydro-massage device for a bathtub includes a first water conduit unit in fluid communication with an inlet unit of a main pump and having a water inlet unit adapted to be disposed in the bathtub and adapted to be in fluid communication with a water source such that the main pump is filled with water from the water source when the water is supplied to the first water conduit unit via the water inlet unit, and a second water conduit unit in fluid communication with an outlet unit of the main pump and having a nozzle end that is adapted to be disposed in the bathtub. Water spouts are formed at the nozzle end when the main pump is activated. A control unit is operable so as to drain water from the main pump via one of the inlet and outlet units after deactivation of the main pump.
    Type: Application
    Filed: May 1, 2007
    Publication date: November 6, 2008
    Inventor: Chin-Lun Chang
  • Publication number: 20080237114
    Abstract: An oil extracting apparatus includes a rigid oil adhering ring having a horizontally disposed ring axis and an oil adhering surface surrounding the ring axis, a driving device coupled to the oil adhering ring for driving rotation of the oil adhering ring about the ring axis, an oil scraping unit, and an oil collecting unit. At least a portion of the oil adhering ring below the ring axis is adapted to be immersed in a water body. Rotation of the oil adhering ring results in separation of the oil from the water body and in adhering of the oil on the oil adhering ring to form an oil film on the oil adhering surface of the oil adhering ring. The oil scraping unit scrapes the oil film from the oil adhering surface of the oil adhering ring. The oil collecting unit collects the oil scraped by the oil scraping unit.
    Type: Application
    Filed: March 29, 2007
    Publication date: October 2, 2008
    Inventor: Chin-Lun Chang