Patents by Inventor Chin Wook Chon

Chin Wook Chon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VAPOR DEPOSITION APPARATUS
    Publication number: 20140174350
    Abstract: There is provided a vapor phase deposition apparatus including: a reaction chamber having a susceptor with a wafer mounted thereon and depositing and growing an epitaxial thin film on the wafer; a housing having the reaction chamber disposed therein and having a window opened and closed to allow the wafer to be loaded into or unloaded from the wafer reaction chamber; and an exhaust unit discharging gas from within the housing to the outside to adjust internal pressure of the housing.
    Type: Application
    Filed: August 9, 2011
    Publication date: June 26, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang Kyu Bang, Chin Wook Chon, Kyung Don Han, Jong Wook Suk, Sung Il Han