Patents by Inventor Ching-An Peng

Ching-An Peng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250118559
    Abstract: A method includes forming a semiconductor substrate, forming hard mask layers (HMs) over the semiconductor substrate, forming first mandrels over the HMs, forming second mandrels along sidewalls of the first mandrels, forming a protective layer over the first mandrels and the second mandrels, removing a portion of the protective layer to expose portions of the first and the second mandrels, removing the exposed portions of the second mandrels with respect to the exposed portions of the first mandrels, removing remaining portions of the protective layer to expose remaining portions of the first and second mandrels, where the exposed portions of the first mandrels and the remaining portions of the first and second mandrels form a mandrel structure, patterning the HMs using the mandrel structure as an etching mask, and patterning the semiconductor substrate to form a fin structure using the patterned HMs as an etching mask.
    Type: Application
    Filed: December 17, 2024
    Publication date: April 10, 2025
    Inventors: Jen-Hong Chang, Yuan-Ching Peng, Jiun-Ming Kuo, Kuo-Yi Chao, Chih-Chung Chang, You-Ting Lin, Yen-Po Lin, Chen-Hsuan Liao
  • Publication number: 20250120230
    Abstract: An optical structure is provided. The optical structure includes a substrate, a light-emitting element, a glue layer, and a light-adjusting element. The light-emitting element is disposed on the substrate. The glue layer covers the light-emitting element. The light-adjusting element is disposed on the glue layer. Moreover, the refractive index of the glue layer is different from the refractive index of the light-adjusting element.
    Type: Application
    Filed: August 21, 2024
    Publication date: April 10, 2025
    Inventors: Shu-Ching PENG, Yu-Hsi SUNG, Jung-Cheng CHANG, Wei-Chung CHENG, Yin-Cyuan WU, Sheng-Fu WANG, Wen-Yu LEE
  • Patent number: 12268023
    Abstract: A semiconductor device includes a source/drain feature over a semiconductor substrate, channel layers connected to the source/drain feature, a gate structure between adjacent channel layers and wrapping the channel layers, and an inner spacer between the source/drain feature and the gate structure and between adjacent channel layers. The source/drain feature has a first interface with a first channel layer of the channel layer. The first interface has a convex profile protruding towards the first channel layer.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: April 1, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Po-Yu Lin, Tzu-Hua Chiu, Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng
  • Publication number: 20250107207
    Abstract: A semiconductor structure includes a semiconductor substrate; fin active regions protruded above the semiconductor substrate; and a gate stack disposed on the fin active regions; wherein the gate stack includes a high-k dielectric material layer, and various metal layers disposed on the high-k dielectric material layer. The gate stack has an uneven profile in a sectional view with a first dimension D1 at a top surface, a second dimension D2 at a bottom surface, and a third dimension D3 at a location between the top surface and the bottom surface, and wherein each of D1 and D2 is greater than D3.
    Type: Application
    Filed: December 9, 2024
    Publication date: March 27, 2025
    Inventors: Chi-Sheng LAI, Wei-Chung SUN, Yu-Bey WU, Yuan-Ching PENG, Yu-Shan LU, Li-Ting CHEN, Shih-Yao LIN, Yu-Fan PENG, Kuei-Yu KAO, Chih-Han LIN, Jing Yi YAN, Pei-Yi LIU
  • Patent number: 12255102
    Abstract: A first layer is formed over a substrate; a second layer is formed over the first layer; and a third layer is formed over the second layer. The first and third layers each have a first semiconductor element; the second layer has a second semiconductor element different from the first semiconductor element. The second layer has the second semiconductor element at a first concentration in a first region and at a second concentration in a second region of the second layer. A source/drain trench is formed in a region of the stack to expose side surfaces of the layers. A first portion of the second layer is removed from the exposed side surface to form a gap between the first and the third layers. A spacer is formed in the gap. A source/drain feature is formed in the source/drain trench and on a sidewall of the spacer.
    Type: Grant
    Filed: November 30, 2023
    Date of Patent: March 18, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Che-Lun Chang, Jiun-Ming Kuo, Ji-Yin Tsai, Yuan-Ching Peng
  • Publication number: 20250089333
    Abstract: The present disclosure provides a semiconductor device and a method of forming the same. A method according one embodiment of the present disclosure include forming an epitaxial stack of channel layers and sacrificial layers on a semiconductor substrate, patterning the epitaxial stack to form a first fin-shape structure in a first region and a second fin-shape structure in a second region, etching the first fin-shape structure to form a first source/drain recess, etching the second fin-shape structure to form a second source/drain recess, forming first inner spacers in the first region, forming second inner spacers in the second region, laterally recessing the second inner spacers, forming a first source/drain feature in the first source/drain recess, and forming a second source/drain feature in the second source/drain recess. After the laterally recessing of the second inner spacers, the second inner spacers have a thickness less than the first inner spacers.
    Type: Application
    Filed: November 17, 2023
    Publication date: March 13, 2025
    Inventors: Hung-Ju Chou, Wei-Yang Lee, Chih-Ching Wang, Yuan-Ching Peng
  • Patent number: 12249539
    Abstract: The present disclosure provides a method of making a semiconductor device. The method includes forming a semiconductor stack on a substrate, wherein the semiconductor stack includes first semiconductor layers of a first semiconductor material and second semiconductor layers of a second semiconductor material alternatively stacked on the substrate; patterning the semiconductor stack and the substrate to form a trench and an active region being adjacent the trench; epitaxially growing a liner of the first semiconductor material on sidewalls of the trench and sidewalls of the active region; forming an isolation feature in the trench; performing a rapid thermal nitridation process, thereby converting the liner into a silicon nitride layer; and forming a cladding layer of the second semiconductor material over the silicon nitride layer.
    Type: Grant
    Filed: June 7, 2022
    Date of Patent: March 11, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu-Wen Shen, Jiun-Ming Kuo, Yuan-Ching Peng, Ji-Xuan Yang, Jheng-Wei Lin, Chien-Hung Chen
  • Patent number: 12237232
    Abstract: A semiconductor structure and a method of forming the same are provided. In an embodiment, a method includes receiving a workpiece comprising a substrate, an active region protruding from the substrate, and a dummy gate structure disposed over a channel region of the active region. The method also includes forming a trench in a source/drain region of the active region, forming a sacrificial structure in the trench, conformally depositing a dielectric film over the workpiece, performing a first etching process to etch back the dielectric film to form fin sidewall (FSW) spacers extending along sidewalls of the sacrificial structure, performing a second etching process to remove the sacrificial structure to expose the trench, forming an epitaxial source/drain feature in the trench such that a portion of the epitaxial source/drain feature being sandwiched by the FSW spacers, and replacing the dummy gate structure with a gate stack.
    Type: Grant
    Filed: February 8, 2022
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: I-Hsieh Wong, Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng
  • Publication number: 20250061727
    Abstract: The image recognition system includes an image sensor and an image processor. The image sensor acquires a plurality of sensed images of continuous frames. The image processor performs image recognition on the plurality of sensed images. The image processor determines on the plurality of sensed images respectively whether the sensed image is a valid frames not containing a road, to determine a plurality of valid sensed images. The image processor determines on the plurality of valid sensed images respectively whether a proportion of an area of a drivable area in a plurality of sub-image regions of the valid sensed image is less than a preset proportion, to perform danger marking. The image processor calculates the number of danger marks of the sub-image regions for each of the valid sensed images. When the number of danger marks is greater than a preset threshold, the image processor generates a danger warning.
    Type: Application
    Filed: November 29, 2023
    Publication date: February 20, 2025
    Inventors: Cheng Yu WEN, Yao-Ching PENG
  • Patent number: 12230712
    Abstract: A semiconductor device according to the present disclosure includes a dielectric fin having a helmet layer, a gate structure disposed over a first portion of the helmet layer and extending along a direction, and a dielectric layer adjacent the gate structure and disposed over a second portion of the helmet layer. A width of the first portion along the direction is greater than a width of the second portion along the direction.
    Type: Grant
    Filed: July 24, 2023
    Date of Patent: February 18, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Shan Lu, Chung-I Yang, Kuo-Yi Chao, Wen-Hsing Hsieh, Jiun-Ming Kuo, Chih-Ching Wang, Yuan-Ching Peng
  • Publication number: 20250056851
    Abstract: A semiconductor device includes a first channel region, a second channel region, and a first insulating fin, the first insulating fin being interposed between the first channel region and the second channel region. The first insulating fin includes a lower portion and an upper portion. The lower portion includes a fill material. The upper portion includes a first dielectric layer on the lower portion, the first dielectric layer being a first dielectric material, a first capping layer on the first dielectric layer, the first capping layer being a second dielectric material, the second dielectric material being different than the first dielectric material, and a second dielectric layer on the first capping layer, the second dielectric layer being the first dielectric material.
    Type: Application
    Filed: October 28, 2024
    Publication date: February 13, 2025
    Inventors: Jen-Hong Chang, Yi-Hsiu Liu, You-Ting Lin, Chih-Chung Chang, Kuo-Yi Chao, Jiun-Ming Kuo, Yuan-Ching Peng, Sung-En Lin, Chia-Cheng Chao, Chung-Ting Ko
  • Publication number: 20250049874
    Abstract: Provided is a Rhodiola rosea nanoemulsion, comprising Rhodiola rosea extract, surfactant, cosurfactant and oil. The surfactant includes diethylene glycol monoethyl ester or polysorbate 80, the cosurfactant includes polysorbate 80, sorbitan oleate 80, or caprylocaproyl polyoxyl-8 glycerides (Labrasol®), and the oil includes Labrafac™ oil or soybean oil, and Rhodiola rosea extract coated in oil-in-water form. Also provided is a method for preparing the Rhodiola rosea nanoemulsion, so as to provide the Rhodiola rosea nanoemulsion suitable for drug delivery.
    Type: Application
    Filed: August 8, 2023
    Publication date: February 13, 2025
    Applicant: MD RESEARCH LTD
    Inventors: Benni Iskandar, Ching-Peng Wei, Ching Kuo Lee
  • Publication number: 20250034043
    Abstract: The present invention relates to a basalt fiber reinforced asphalt concrete, which includes: an asphalt material with a penetration grade between 40-300 at room temperature, selected from one of an asphalt mortar, an oil-soluble asphalt, an emulsified asphalt, and a modified asphalt; an aggregate having a first volume percentage between 50-80%; a basalt fiber reinforcement with a second volume percentage between 0.1-0.9%; and a chemical admixture for asphalt concrete used to adjust the properties of the basalt fiber reinforced asphalt concrete.
    Type: Application
    Filed: October 6, 2023
    Publication date: January 30, 2025
    Inventors: Jieh-Haur CHEN, Yu-Min SU, Min-Chih LIAO, Yen-Yu LIN, Cheng-Ching PENG
  • Publication number: 20250034042
    Abstract: The present invention relates to a basalt fiber reinforced concrete, which includes: a cement slurry with a water-to-cement ratio between 0.3 and 0.5, and a slurry volume percentage between 15-25%; an aggregate with an aggregate volume percentage between 65% and 75%; a basalt fiber reinforcement with a fiber volume percentage between 0.2% and 1.00%; and a concrete admixture used to adjust the properties of the basalt fiber reinforced concrete.
    Type: Application
    Filed: October 6, 2023
    Publication date: January 30, 2025
    Inventors: Jieh-Haur CHEN, Yu-Min SU, Min-Chih LIAO, Yen-Yu LIN, Cheng-Ching PENG
  • Patent number: 12206004
    Abstract: A method includes forming a p-well and an n-well in a substrate. The method further includes forming a stack of interleaving first semiconductor layers and second semiconductor layers over the p-well and the n-well, the first semiconductor layers having a first thickness and the second semiconductor layers having a second thickness different than the first thickness. The method further includes annealing the stack of interleaving semiconductor layers. The method further includes patterning the stack to form fin-shaped structures including a first fin-shaped structure over the n-well and a second fin-shaped structure over the p-well. The method further includes etching to remove the second semiconductor layers from the first and second fin-shaped structures, where the first semiconductor layers have a different thickness within each of the first and second fin-shaped structures after the etching. The method further includes forming a metal gate over the first and second fin-shaped structures.
    Type: Grant
    Filed: May 6, 2022
    Date of Patent: January 21, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hung-Ju Chou, Yen-Po Lin, Jiun-Ming Kuo, Yuan-Ching Peng
  • Patent number: 12205907
    Abstract: Integrated circuit (IC) chips and seal ring structures are provided. An IC chip according to the present disclosure includes a circuit region and a seal ring region surrounding the circuit region. The seal ring region includes a first active region extending lengthwise in a first direction and a first gate structure disposed on the first active region. The first gate structure extends lengthwise in a second direction that is tilted from the first direction. The first direction and the second direction form a tilted angle therebetween.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: January 21, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Bey Wu, Yen-Lian Lai, Yung Feng Chang, Jiun-Ming Kuo, Yuan-Ching Peng
  • Publication number: 20250015080
    Abstract: The embodiments of the disclosure provide a FinFET. The FinFET includes a substrate, a first gate stack and a second gate stack. The substrate has a first fin and a second fin. The first gate stack is across the first fin and extends along a widthwise direction of the first fin. The second gate stack is across the second fin and extends along a widthwise direction of the second fin. A bottommost surface of the first gate stack is lower than a bottommost surface of the second gate stack, and a first gate height of the first gate stack directly on the first fin is substantially equal to a second gate height of the second gate stack directly on the second fin.
    Type: Application
    Filed: September 23, 2024
    Publication date: January 9, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Szu-Wei Tseng, Jiun-Ming Kuo, Yuan-Ching Peng, Kuo-Yi Chao
  • Patent number: 12191370
    Abstract: A method includes forming a stack of channel layers and sacrificial layers on a substrate. The channel layers and the sacrificial layers have different material compositions and being alternatingly disposed in a vertical direction. The method further includes patterning the stack to form a semiconductor fin, forming an isolation feature on sidewalls of the semiconductor fin, recessing the semiconductor fin, thereby forming a source/drain recess, such that a recessed top surface of the semiconductor fin is below a top surface of the isolation feature, growing a base epitaxial layer from the recessed top surface of the semiconductor fin, depositing an insulation layer in the source/drain recess, and forming an epitaxial feature in the source/drain recess, wherein the epitaxial feature is above the insulation layer. The insulation layer is above the base epitaxial layer and above a bottommost channel layer.
    Type: Grant
    Filed: April 6, 2022
    Date of Patent: January 7, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Bo-Yu Lai, Wei-Yang Lee, Ming-Lung Cheng, Chia-Pin Lin, Yuan-Ching Peng
  • Patent number: 12176212
    Abstract: A method includes forming a semiconductor substrate, forming hard mask layers (HMs) over the semiconductor substrate, forming first mandrels over the HMs, forming second mandrels along sidewalls of the first mandrels, forming a protective layer over the first mandrels and the second mandrels, removing a portion of the protective layer to expose portions of the first and the second mandrels, removing the exposed portions of the second mandrels with respect to the exposed portions of the first mandrels, removing remaining portions of the protective layer to expose remaining portions of the first and second mandrels, where the exposed portions of the first mandrels and the remaining portions of the first and second mandrels form a mandrel structure, patterning the HMs using the mandrel structure as an etching mask, and patterning the semiconductor substrate to form a fin structure using the patterned HMs as an etching mask.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: December 24, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jen-Hong Chang, Yuan-Ching Peng, Jiun-Ming Kuo, Kuo-Yi Chao, Chih-Chung Chang, You-Ting Lin, Yen-Po Lin, Chen-Hsuan Liao
  • Patent number: 12166076
    Abstract: A semiconductor device includes a first channel region, a second channel region, and a first insulating fin, the first insulating fin being interposed between the first channel region and the second channel region. The first insulating fin includes a lower portion and an upper portion. The lower portion includes a fill material. The upper portion includes a first dielectric layer on the lower portion, the first dielectric layer being a first dielectric material, a first capping layer on the first dielectric layer, the first capping layer being a second dielectric material, the second dielectric material being different than the first dielectric material, and a second dielectric layer on the first capping layer, the second dielectric layer being the first dielectric material.
    Type: Grant
    Filed: August 16, 2021
    Date of Patent: December 10, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jen-Hong Chang, Yi-Hsiu Liu, You-Ting Lin, Chih-Chung Chang, Kuo-Yi Chao, Jiun-Ming Kuo, Yuan-Ching Peng, Sung-En Lin, Chia-Cheng Chao, Chung-Ting Ko