Patents by Inventor Ching-Chiy Cheng

Ching-Chiy Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Jet-cleaning device for developing station
    Patent number: 6070601
    Abstract: A jet-cleaning device for a developing station, especially suitable for installing on a wafer back cleaning ring of a CLEAN TRACK MK-V developing station. The jet-cleaning device is used for cleaning the wafer back of a wafer mounted above a spinner. The jet-cleaning, device comprises a jet-cleaning block and a vertical nozzle. The jet-cleaning block has a nozzle groove having an inlet for pumping in a cleaning solution. The vertical nozzle is connected to the nozzle groove for forming a vertical jet of the cleaning solution so that waste liquid on a wafer back can be removed.
    Type: Grant
    Filed: April 22, 1998
    Date of Patent: June 6, 2000
    Assignee: United Microelectronics Corp.
    Inventors: Wen-Liang Fang, Ching-Chiy Cheng, Richard Leu, Kuo-Feng Huang