Patents by Inventor Ching-Han Yeh

Ching-Han Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal gate semiconductor device
    Patent number: 8629515
    Abstract: A semiconductor device includes a semiconductor substrate, a source and a drain region formed on the semiconductor substrate, and a gate structure disposed on the substrate between the source and drain regions. The gate structure includes an interfacial layer formed over the substrate, a high-k dielectric formed over the interfacial layer, and a metal gate formed over the high-k dielectric that includes a first metal layer and a second metal layer, where the first metal layer is formed on a portion of the sidewalls of the gate structure and where the second metal layer is formed on another portion of the sidewalls of the gate structure.
    Type: Grant
    Filed: September 26, 2011
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Han Yeh, Chen-Pin Hsu, Ming-Yuan Wu, Kong-Beng Thei, Harry Chuang
  • METAL GATE SEMICONDUCTOR DEVICE
    Publication number: 20120012948
    Abstract: A semiconductor device includes a semiconductor substrate, a source and a drain region formed on the semiconductor substrate, and a gate structure disposed on the substrate between the source and drain regions. The gate structure includes an interfacial layer formed over the substrate, a high-k dielectric formed over the interfacial layer, and a metal gate formed over the high-k dielectric that includes a first metal layer and a second metal layer, where the first metal layer is formed on a portion of the sidewalls of the gate structure and where the second metal layer is formed on another portion of the sidewalls of the gate structure.
    Type: Application
    Filed: September 26, 2011
    Publication date: January 19, 2012
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd. ("TSMC")
    Inventors: Ching-Han Yeh, Chen-Pin Hsu, Ming-Yuan Wu, Kong-Beng Thei, Harry Chuang