Patents by Inventor Ching-Hou Su

Ching-Hou Su has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240087861
    Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.
    Type: Application
    Filed: November 17, 2023
    Publication date: March 14, 2024
    Inventors: Tsung-Jen YANG, Yi-Zhen CHEN, Chih-Pin WANG, Chao-Li SHIH, Ching-Hou SU, Cheng-Yi HUANG
  • Patent number: 11854776
    Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.
    Type: Grant
    Filed: July 28, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Jen Yang, Yi-Zhen Chen, Chih-Pin Wang, Chao-Li Shih, Ching-Hou Su, Cheng-Yi Huang
  • Publication number: 20230307292
    Abstract: An integrated circuit (IC) structure includes a substrate, an interconnect structure, metal lines, a liner, a protecting layer, and a nitride-free passivation layer. The interconnect structure is over the substrate. The metal lines are over the interconnect structure. The liner is conformally formed on the metal lines. The protecting layer is over the liner. The nitride-free passivation layer continuously extends from the liner to the protecting layer and forms an interface with the liner.
    Type: Application
    Filed: May 15, 2023
    Publication date: September 28, 2023
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chiang CHEN, Chun-Ting WU, Ching-Hou SU, Chih-Pin WANG
  • Patent number: 11721662
    Abstract: A method of aligning two wafers during a bonding process includes aligning a first wafer having a plurality of alignment markings with a second wafer having a plurality of alignment markings. The method further includes placing a plurality of flags between the first wafer and the second wafer. The method further includes detecting movement of the plurality of flags with respect to the first wafer and the second wafer using at least one sensor. The method further includes determining whether the wafers remain aligned within an alignment tolerance based on the detected movement of the plurality of flags relative to the first wafer and the second wafer.
    Type: Grant
    Filed: November 4, 2020
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yun-Tai Shih, Ching-Hou Su, Chyi-Tsong Ni, I-Shi Wang, Jeng-Hao Lin, Kuan-Ming Pan, Jui-Mu Cho, Wun-Kai Tsai
  • Patent number: 11695150
    Abstract: The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: July 4, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chyi-Tsong Ni, I-Shi Wang, Yi Hsun Chiu, Ching-Hou Su
  • Patent number: 11688633
    Abstract: An integrated circuit (IC) structure includes a substrate, a transistor, an interconnect structure, a plurality of metal lines, an oxide liner, a passivation layer, and a nitride layer. The transistor is on the substrate. The interconnect structure is over the transistor. The metal lines is on the interconnect structure. The oxide liner is over the plurality of metal lines. The passivation layer is over the oxide liner and is more porous than the passivation layer. The nitride layer is over the passivation layer.
    Type: Grant
    Filed: July 16, 2021
    Date of Patent: June 27, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chiang Chen, Chun-Ting Wu, Ching-Hou Su, Chih-Pin Wang
  • Publication number: 20220367160
    Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.
    Type: Application
    Filed: July 28, 2022
    Publication date: November 17, 2022
    Inventors: Tsung-Jen YANG, Yi-Zhen CHEN, Chih-Pin WANG, Chao-Li SHIH, Ching-Hou SU, Cheng-Yi HUANG
  • Patent number: 11488814
    Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: November 1, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tsung-Jen Yang, Yi-Zhen Chen, Chih-Pin Wang, Chao-Li Shih, Ching-Hou Su, Cheng-Yi Huang
  • Patent number: 11211301
    Abstract: A semiconductor device includes a first conductive feature and a second conductive feature. A first passivation layer is positioned between the first conductive feature and the second conductive feature. A second passivation layer is positioned between the first conductive feature and the second conductive feature and over the first passivation layer. A lowermost portion of an interface where the first passivation layer contacts the second passivation layer is positioned below 40% or above 60% of a height of the first conductive feature.
    Type: Grant
    Filed: February 11, 2020
    Date of Patent: December 28, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Chunting Wu, Ching-Hou Su, Chih-Pin Wang
  • Publication number: 20210384544
    Abstract: The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.
    Type: Application
    Filed: August 19, 2021
    Publication date: December 9, 2021
    Inventors: Chyi-Tsong Ni, I-Shi Wang, Yi Hsun Chiu, Ching-Hou Su
  • Publication number: 20210343587
    Abstract: An integrated circuit (IC) structure includes a substrate, a transistor, an interconnect structure, a plurality of metal lines, an oxide liner, a passivation layer, and a nitride layer. The transistor is on the substrate. The interconnect structure is over the transistor. The metal lines is on the interconnect structure. The oxide liner is over the plurality of metal lines. The passivation layer is over the oxide liner and is more porous than the passivation layer. The nitride layer is over the passivation layer.
    Type: Application
    Filed: July 16, 2021
    Publication date: November 4, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chiang CHEN, Chun-Ting WU, Ching-Hou SU, Chih-Pin WANG
  • Patent number: 11101491
    Abstract: The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.
    Type: Grant
    Filed: June 24, 2019
    Date of Patent: August 24, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chyi-Tsong Ni, I-Shi Wang, Yi Hsun Chiu, Ching-Hou Su
  • Publication number: 20210249321
    Abstract: A semiconductor device includes a first conductive feature and a second conductive feature. A first passivation layer is positioned between the first conductive feature and the second conductive feature. A second passivation layer is positioned between the first conductive feature and the second conductive feature and over the first passivation layer. A lowermost portion of an interface where the first passivation layer contacts the second passivation layer is positioned below 40% or above 60% of a height of the first conductive feature.
    Type: Application
    Filed: February 11, 2020
    Publication date: August 12, 2021
    Inventors: Chunting WU, Ching-Hou SU, Chih-Pin WANG
  • Patent number: 11069562
    Abstract: A method includes forming metal lines over an interconnect structure that is formed above transistors; depositing a liner layer over the metal lines using a first high density plasma chemical vapor deposition (HDPCVD) process with a zero RF bias power depositing a first passivation layer over the liner layer using a second HDPCVD process with a non-zero RF bias power; and depositing a second passivation layer in contact with a top surface of the first passivation layer using a third HDPCVD process with a non-zero RF bias power.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: July 20, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chiang Chen, Chun-Ting Wu, Ching-Hou Su, Chih-Pin Wang
  • Publication number: 20210217659
    Abstract: A method includes forming metal lines over an interconnect structure that is formed above transistors; depositing a liner layer over the metal lines using a first high density plasma chemical vapor deposition (HDPCVD) process with a zero RF bias power depositing a first passivation layer over the liner layer using a second HDPCVD process with a non-zero RF bias power; and depositing a second passivation layer in contact with a top surface of the first passivation layer using a third HDPCVD process with a non-zero RF bias power.
    Type: Application
    Filed: January 15, 2020
    Publication date: July 15, 2021
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chiang CHEN, Chun-Ting WU, Ching-Hou SU, Chih-Pin WANG
  • Publication number: 20210050324
    Abstract: A method of aligning two wafers during a bonding process includes aligning a first wafer having a plurality of alignment markings with a second wafer having a plurality of alignment markings. The method further includes placing a plurality of flags between the first wafer and the second wafer. The method further includes detecting movement of the plurality of flags with respect to the first wafer and the second wafer using at least one sensor. The method further includes determining whether the wafers remain aligned within an alignment tolerance based on the detected movement of the plurality of flags relative to the first wafer and the second wafer.
    Type: Application
    Filed: November 4, 2020
    Publication date: February 18, 2021
    Inventors: Yun-Tai SHIH, Ching-Hou SU, Chyi-Tsong NI, I-Shi WANG, Jeng-Hao LIN, Kuan-Ming PAN, Jui-Mu CHO, Wun-Kai TSAI
  • Patent number: 10847490
    Abstract: An apparatus includes an alignment module configured to align a first wafer and a second wafer based on alignment markers on the first wafer and corresponding alignment markers on the second wafer. The apparatus further includes a flag placement module configured to insert a plurality of flags between the first wafer and the second wafer, a flag-out mechanism configured to simultaneously move the plurality of flags to a flag-out position, and a controller configured to determine whether the wafers remain aligned within an alignment tolerance based on an amount of time for each flag of the plurality of flags to reach the flag-out position.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: November 24, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yun-Tai Shih, Kuan-Ming Pan, Jeng-Hao Lin, I-Shi Wang, Jui-Mu Cho, Ching-Hou Su, Chyi-Tsong Ni, Wun-Kai Tsai
  • Publication number: 20200161108
    Abstract: In an embodiment, a magnetic assembly includes: an inner permeance annulus; and an outer permeance annulus connected to the inner permeance annulus via magnets, wherein the outer permeance annulus comprises a peak region with a thickness greater than other regions of the outer permeance annulus.
    Type: Application
    Filed: October 8, 2019
    Publication date: May 21, 2020
    Inventors: Tsung-Jen YANG, Yi-Zhen CHEN, Chih-Pin WANG, Chao-Li SHIH, Ching-Hou SU, Cheng-Yi HUANG
  • Publication number: 20190378813
    Abstract: An apparatus includes an alignment module configured to align a first wafer and a second wafer based on alignment markers on the first wafer and corresponding alignment markers on the second wafer. The apparatus further includes a flag placement module configured to insert a plurality of flags between the first wafer and the second wafer, a flag-out mechanism configured to simultaneously move the plurality of flags to a flag-out position, and a controller configured to determine whether the wafers remain aligned within an alignment tolerance based on an amount of time for each flag of the plurality of flags to reach the flag-out position.
    Type: Application
    Filed: August 21, 2019
    Publication date: December 12, 2019
    Inventors: Yun-Tai SHIH, Kuan-Ming PAN, Jeng-Hao LIN, I-Shi WANG, Jui-Mu CHO, Ching-Hou SU, Chyi-Tsong NI, Wun-Kai TSAI
  • Publication number: 20190312298
    Abstract: The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.
    Type: Application
    Filed: June 24, 2019
    Publication date: October 10, 2019
    Inventors: Chyi-Tsong Ni, I-Shi Wang, Yi Hsun Chiu, Ching-Hou Su