Patents by Inventor Ching-Hsiang Chiu

Ching-Hsiang Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10818556
    Abstract: A method for forming a semiconductor structure is provided. Multiple fins extending along a first direction are formed in a semiconductor substrate. The multiple fins includes a group of active fins, a pair of protection fins sandwiching about the group the active fins, and at least one dummy fin around the pair of protection fins. A fin cut process is performed to remove the at least one dummy fin around the pair of protection fins. After performing the fin cut process, trench isolation structures are formed within the trenches between the multiple fins. The trench isolation structures are subjected to an anneal process. After annealing the trench isolation structures, the pair of protection fins is removed.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: October 27, 2020
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hao-Yeh Liu, Jia-Feng Fang, Yu-Hsiang Lin, Ching-Hsiang Chiu, Chia-Wei Liu
  • Publication number: 20200194313
    Abstract: A method for forming a semiconductor structure is provided. Multiple fins extending along a first direction are formed in a semiconductor substrate. The multiple fins includes a group of active fins, a pair of protection fins sandwiching about the group the active fins, and at least one dummy fin around the pair of protection fins. A fin cut process is performed to remove the at least one dummy fin around the pair of protection fins. After performing the fin cut process, trench isolation structures are formed within the trenches between the multiple fins. The trench isolation structures are subjected to an anneal process. After annealing the trench isolation structures, the pair of protection fins is removed.
    Type: Application
    Filed: December 17, 2018
    Publication date: June 18, 2020
    Inventors: Hao-Yeh Liu, Jia-Feng Fang, Yu-Hsiang Lin, Ching-Hsiang Chiu, Chia-Wei Liu
  • Patent number: 10290723
    Abstract: A semiconductor device includes a substrate and a gate structure on the substrate, in which the gate structure includes a high-k dielectric layer on the substrate and a bottom barrier metal (BBM) layer on the high-k dielectric layer. Preferably, the BBM layer includes a top portion, a middle portion, and a bottom portion, the middle portion being a nitrogen rich portion, the top portion and the bottom portion being titanium rich portions, and the top portion, the middle portion, and the bottom portion are of same material composition.
    Type: Grant
    Filed: May 17, 2018
    Date of Patent: May 14, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Tsen Lu, Chien-Ming Lai, Lu-Sheng Chou, Ya-Huei Tsai, Ching-Hsiang Chiu, Yu-Tung Hsiao, Chen-Ming Huang, Kun-Ju Li, Yu-Ping Wang
  • Publication number: 20180269308
    Abstract: A semiconductor device includes a substrate and a gate structure on the substrate, in which the gate structure includes a high-k dielectric layer on the substrate and a bottom barrier metal (BBM) layer on the high-k dielectric layer. Preferably, the BBM layer includes a top portion, a middle portion, and a bottom portion, the middle portion being a nitrogen rich portion, the top portion and the bottom portion being titanium rich portions, and the top portion, the middle portion, and the bottom portion are of same material composition.
    Type: Application
    Filed: May 17, 2018
    Publication date: September 20, 2018
    Inventors: Chun-Tsen Lu, Chien-Ming Lai, Lu-Sheng Chou, Ya-Huei Tsai, Ching-Hsiang Chiu, Yu-Tung Hsiao, Chen-Ming Huang, Kun-Ju Li, Yu-Ping Wang
  • Patent number: 10008581
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a substrate and a gate structure on the substrate. The gate structure includes a high-k dielectric layer on the substrate and a bottom barrier metal (BBM) layer on the high-k dielectric layer. Preferably, the BBM layer includes a top portion, a middle portion, and a bottom portion, in which the top portion being a nitrogen rich portion, and the middle portion and the bottom portion being titanium rich portions.
    Type: Grant
    Filed: August 30, 2015
    Date of Patent: June 26, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Tsen Lu, Chien-Ming Lai, Lu-Sheng Chou, Ya-Huei Tsai, Ching-Hsiang Chiu, Yu-Tung Hsiao, Chen-Ming Huang, Kun-Ju Li, Yu-Ping Wang
  • Publication number: 20170040435
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a substrate and a gate structure on the substrate. The gate structure includes a high-k dielectric layer on the substrate and a bottom barrier metal (BBM) layer on the high-k dielectric layer. Preferably, the BBM layer includes a top portion, a middle portion, and a bottom portion, in which the top portion being a nitrogen rich portion, and the middle portion and the bottom portion being titanium rich portions.
    Type: Application
    Filed: August 30, 2015
    Publication date: February 9, 2017
    Inventors: Chun-Tsen Lu, Chien-Ming Lai, Lu-Sheng Chou, Ya-Huei Tsai, Ching-Hsiang Chiu, Yu-Tung Hsiao, Chen-Ming Huang, Kun-Ju Li, Yu-Ping Wang
  • Patent number: 9524967
    Abstract: A semiconductor device and a method of forming the same, the semiconductor device include a substrate, and a first transistor, a second transistor and a third transistor all disposed on the substrate. The first transistor includes a first channel, and a first barrier layer and a first work function layer stacked with each other on the first channel. The second transistor includes a second channel, and a second barrier layer and a second work function layer stacked with each other. The third transistor includes a third channel and a third barrier layer and a third work function layer stacked with each other on the third channel, wherein the first barrier layer, the second barrier layer and the third barrier layer have different nitrogen ratio. The first, the second and the third transistors have different threshold voltages, respectively.
    Type: Grant
    Filed: February 18, 2016
    Date of Patent: December 20, 2016
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Hao-Yeh Liu, Chien-Ming Lai, Yu-Ping Wang, Mon-Sen Lin, Ya-Huei Tsai, Ching-Hsiang Chiu
  • Publication number: 20070298635
    Abstract: A variable length dummy card includes a fixed component and a moveable component. The fixed component includes a first sliding part. A second sliding part is arranged on the moveable component corresponding to the first sliding part. Therefore, the moveable component slides on the fixed component and changes the length of the dummy card.
    Type: Application
    Filed: January 31, 2007
    Publication date: December 27, 2007
    Applicant: Quanta Computer Inc.
    Inventor: Ching-Hsiang Chiu
  • Patent number: 7050294
    Abstract: An LCD panel pop-up structure is applied in a notebook computer. The LCD panel pop-up structure can be integrated into a touch pad base support by redesigning its structure. The touch pad base is built inside a notebook PC's mainframe. An arched resilient plate is secured in a recess of the touch pad base. An opening on the notebook PC's mainframe is aligned with the arched resilient plate and a latch of the LCD panel. When the LCD panel is folded down, a latch is lead through the opening and the arched resilient plate is deformed by pressure from the latch. A recovery force of the arched resilient plate serves as a pop-up force for the LCD panel.
    Type: Grant
    Filed: December 29, 2004
    Date of Patent: May 23, 2006
    Assignee: Quanta Computer, Inc.
    Inventors: Ching-Hsiang Chiu, Wen-Shu Lee
  • Publication number: 20050185369
    Abstract: An LCD panel pop-up structure is applied in a notebook computer. The LCD panel pop-up structure can be integrated into a touch pad base support by redesigning its structure. The touch pad base is built inside a notebook PC's mainframe. An arched resilient plate is secured in a recess of the touch pad base. An opening on the notebook PC's mainframe is aligned with the arched resilient plate and a latch of the LCD panel. When the LCD panel is folded down, a latch is lead through the opening and the arched resilient plate is deformed by pressure from the latch. A recovery force of the arched resilient plate serves as a pop-up force for the LCD panel.
    Type: Application
    Filed: December 29, 2004
    Publication date: August 25, 2005
    Inventors: Ching-Hsiang Chiu, Wen-Shu Lee