Patents by Inventor Ching-Hsiung Lo
Ching-Hsiung Lo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10546850Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: GrantFiled: December 24, 2018Date of Patent: January 28, 2020Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Publication number: 20190148357Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: ApplicationFiled: December 24, 2018Publication date: May 16, 2019Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 10163894Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: GrantFiled: February 12, 2018Date of Patent: December 25, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 10026727Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: GrantFiled: January 30, 2017Date of Patent: July 17, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Publication number: 20180166437Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: ApplicationFiled: February 12, 2018Publication date: June 14, 2018Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 9893052Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: GrantFiled: July 18, 2016Date of Patent: February 13, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Publication number: 20170141098Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: ApplicationFiled: January 30, 2017Publication date: May 18, 2017Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Patent number: 9559008Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: GrantFiled: November 16, 2015Date of Patent: January 31, 2017Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Publication number: 20160329319Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: ApplicationFiled: July 18, 2016Publication date: November 10, 2016Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 9397098Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: GrantFiled: November 26, 2014Date of Patent: July 19, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 9312384Abstract: A semiconductor device may include body contacts on a finFET device for ESD protection. The semiconductor device comprises a semiconductor fin, a source/drain region and a body contact. The source/drain region and the body contact are in the semiconductor fin. A portion of the fin is laterally between the source/drain region and the body contact. The semiconductor fin is on a substrate.Type: GrantFiled: December 8, 2014Date of Patent: April 12, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Hsiung Lo, Jam-Wem Lee, Wun-Jie Lin, Jen-Chou Tseng
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Publication number: 20160071773Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: ApplicationFiled: November 16, 2015Publication date: March 10, 2016Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Patent number: 9190519Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: GrantFiled: June 20, 2014Date of Patent: November 17, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Publication number: 20150137264Abstract: A semiconductor device may include body contacts on a finFET device for ESD protection. The semiconductor device comprises a semiconductor fin, a source/drain region and a body contact. The source/drain region and the body contact are in the semiconductor fin. A portion of the fin is laterally between the source/drain region and the body contact. The semiconductor fin is on a substrate.Type: ApplicationFiled: December 8, 2014Publication date: May 21, 2015Inventors: Ching-Hsiung Lo, Jam-Wem Lee, Wun-Jie Lin, Jen-Chou Tseng
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Publication number: 20150084134Abstract: A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.Type: ApplicationFiled: November 26, 2014Publication date: March 26, 2015Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng, Han-Jen Yang, Arabinda Das
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Patent number: 8928093Abstract: A semiconductor device may include body contacts on a finFET device for ESD protection. The semiconductor device comprises a semiconductor fin, a source/drain region and a body contact. The source/drain region and the body contact are in the semiconductor fin. A portion of the fin is laterally between the source/drain region and the body contact. The semiconductor fin is on a substrate.Type: GrantFiled: March 10, 2014Date of Patent: January 6, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Hsiung Lo, Jam-Wem Lee, Wun-Jie Lin, Jen-Chou Tseng
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Publication number: 20140299943Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: ApplicationFiled: June 20, 2014Publication date: October 9, 2014Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Patent number: 8809905Abstract: An electrostatic discharge (ESD) protection device includes a well region formed from semiconductor material with a first doping type and a floating base formed from semiconductor material with a second doping type. The floating base is disposed vertically above the well region. The ESD also includes a first terminal receiving region formed from semiconductor material with a third doping type. The first terminal receiving region is disposed vertically above the floating base. The ESD further includes a second terminal receiving region. The second terminal receiving region is laterally spaced apart from the first terminal receiving region by silicon trench isolation (STI) region. In some embodiments, the second terminal receiving region is formed from semiconductor material with the third doping type to form a bipolar junction transmitter (BJT) or with a fourth doping type to form a silicon controlled rectifier (SCR).Type: GrantFiled: December 28, 2011Date of Patent: August 19, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Patent number: 8779517Abstract: A device includes a plurality of STI regions, a plurality of semiconductor strips between the STI regions and parallel to each other, and a plurality of semiconductor fins over the semiconductor strips. A gate stack is disposed over and crossing the plurality of semiconductor fins. A drain epitaxy semiconductor region is disposed on a side of the gate stack and connected to the plurality of semiconductor fins. The drain epitaxy semiconductor region includes a first portion adjoining the semiconductor fins, wherein the first portion forms a continuous region over and aligned to the plurality of semiconductor strips. The drain epitaxy semiconductor region further includes second portions farther away from the gate stack than the first portion. Each of the second portions is over and aligned to one of the semiconductor strips. The second portions are parallel to each other, and are separated from each other by a dielectric material.Type: GrantFiled: March 8, 2012Date of Patent: July 15, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Wun-Jie Lin, Ching-Hsiung Lo, Jen-Chou Tseng
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Publication number: 20140193959Abstract: A semiconductor device may include body contacts on a finFET device for ESD protection. The semiconductor device comprises a semiconductor fin, a source/drain region and a body contact. The source/drain region and the body contact are in the semiconductor fin. A portion of the fin is laterally between the source/drain region and the body contact. The semiconductor fin is on a substrate.Type: ApplicationFiled: March 10, 2014Publication date: July 10, 2014Applicant: Taiwan Semiconductor Manufacturing Company, LtdInventors: Ching-Hsiung Lo, Jam-Wem Lee, Wun-Jie Lin, Jen-Chou Tseng