Abstract: A method of improving wafer yield by accurately identifying tilted wafer conditions may include providing inquiry signals in gaps defined between machine signals where the inquiry signals relate to temperature information indicative of a temperature of a hot plate having an item placed thereon, receiving the temperature information, and determining a seating condition of the item based on a comparison of the temperature information to an expected heat profile for a fully seated item. A corresponding apparatus is also provided.

Abstract: A device for detecting leakage of a chemical solvent from a tool for manufacturing a semiconductor device that includes a control box for receiving at least one input signal, including a front panel having a first indicator capable of providing an alert for chemical solvent leakage, and a circuit board for receiving the at least one input signal and triggering the alert, a tray configured for collecting the leaked chemical solvent, including a plurality of substantially vertical sides, and a plurality of legs, at least one of which being adjustable to render a corner of the tray closer to ground relative to other corners of the tray, and a sensor provided at a position relative to the tray for detecting chemical solvent leakage and providing the input signal to the control box.

Abstract: A alarm system for waste liquid discharge blockage for early warning when blockage results from waste liquid. In the blockage alarm system for waste liquid discharge according to the present invention, the discharge line connected to the outlet of waste liquid of the machine is arranged such that the discharge line is angled in the ranges of about 185 to 265 degrees to allow the waste liquid flow smoothly. The first pipe and the second pipe of the sensing line are arranged roughly under the connection of the discharge line and the lowest outlet, and located to make the angle between the first pipe and the discharge line of the sensing region in the range of about 95 to 175 degrees and the angle between the second pipe and the discharge line of the sensing region in the range of about 95 to 175 degrees when the discharge line of the sensing region is vertical. The flow back of the waste liquid into the sensing region can be inhibited. A sensor can be provided in the sensing line for detection of blockage.