Patents by Inventor Ching-Hui TSAO

Ching-Hui TSAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for baking photoresist patterns
    Patent number: 9541836
    Abstract: In accordance with some embodiments, a method and an apparatus for baking photoresist patterns are provided. The method includes putting a wafer over a heating assembly. A photoresist pattern is formed over a top surface of the wafer. The method further includes curing the wafer from the top surface of the wafer by a curing assembly while heating the wafer from a bottom surface of the wafer by a heating assembly.
    Type: Grant
    Filed: February 10, 2014
    Date of Patent: January 10, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chin-Min Lin, De-Fang Huang, Ching-Hui Tsao
  • METHOD AND APPARATUS FOR BAKING PHOTORESIST PATTERNS
    Publication number: 20150227050
    Abstract: In accordance with some embodiments, a method and an apparatus for baking photoresist patterns are provided. The method includes putting a wafer over a heating assembly. A photoresist pattern is formed over a top surface of the wafer. The method further includes curing the wafer from the top surface of the wafer by a curing assembly while heating the wafer from a bottom surface of the wafer by a heating assembly.
    Type: Application
    Filed: February 10, 2014
    Publication date: August 13, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chin-Min LIN, De-Fang HUANG, Ching-Hui TSAO