Abstract: Some implementations described herein provide an exposure tool. The exposure tool includes a reticle deformation detector and one or more processors configured to obtain, via the reticle deformation detector, reticle deformation information associated with a reticle during a scanning process for scanning multiple fields of a wafer. The one or more processors determine, based on the reticle deformation information, a deformation of the reticle at multiple times during the scanning process, and perform, based on the deformation of the reticle at the multiple times, one or more adjustments of one or more components of the exposure tool during the scanning process.

Abstract: Some implementations described herein provide an exposure tool. The exposure tool includes a reticle deformation detector and one or more processors configured to obtain, via the reticle deformation detector, reticle deformation information associated with a reticle during a scanning process for scanning multiple fields of a wafer. The one or more processors determine, based on the reticle deformation information, a deformation of the reticle at multiple times during the scanning process, and perform, based on the deformation of the reticle at the multiple times, one or more adjustments of one or more components of the exposure tool during the scanning process.

Abstract: Some implementations described herein provide an exposure tool. The exposure tool includes a reticle deformation detector and one or more processors configured to obtain, via the reticle deformation detector, reticle deformation information associated with a reticle during a scanning process for scanning multiple fields of a wafer. The one or more processors determine, based on the reticle deformation information, a deformation of the reticle at multiple times during the scanning process, and perform, based on the deformation of the reticle at the multiple times, one or more adjustments of one or more components of the exposure tool during the scanning process.

Abstract: The present invention provides a stirrer set, comprising: a fitting tube having an opening portion and a hollow rotating shaft fitted into the opening portion, the hollow rotating shaft having an external wall which is annularly recessed to form at least one annular groove. The present invention also provides a stirring device, wherein a drive element comprising a power transmission element, such as a belt, may be rotatably driven to cause, via the power transmission element, the stirrer set to rotate for performing a stirring function. As such, the stirring device provides higher design flexibility when dealing with high-flux samples, and the element replacement rates can be significantly reduced. Thus, the costs related to manufacturing, repair, maintenance and other processes can be reduced in an effective manner.

Abstract: A fiber optics polychromatic animation configuration for a clock includes an array of penetrating holes in an appropriate amount installed on the numbers and surface of the dial in order to provide polychromatic patterns when the holes are penetrated by fiber optics coupled to multicolor LEDs driven by a circuit board. The circuit board drives the LEDs so as to illuminate the fiber optics accordingly, particularly to display polychromatic animation while the clock is alarming by a time signal or a timer setting, or even while the clock darkens up during the nighttime so that it is still capable of showing time and patterns distinctly.