Patents by Inventor Ching-Kun Chen

Ching-Kun Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140015107
    Abstract: Closed loop control may be used to improve uniformity of within wafer uniformity using chemical mechanical planarization. For example, closed loop control may be used to determine a control profile for a chemical mechanical planarization process to more uniformly and consistently achieve the desired extent of variation of within wafer uniformity of a semiconductor wafer.
    Type: Application
    Filed: July 12, 2012
    Publication date: January 16, 2014
    Inventors: Ching-Kun Chen, Chun-Fu Chen, Chin-Ta Su