Abstract: An innovative imaging-based subject-specific whole-lung deposition model is provided. Computed tomography (CT) lung volumetric images at total lung capacity (TLC) may be used to segment airways and lobes, and registration of CT images at TLC and functional residual capacity (FRC) provided metrics of regional air volume changes. A volume-filling technique may then be used to generate the entire conducting airways and acinar units. In each acinar unit, a respiratory airway model may be generated based on existing morphometric data. The flow distributions in conducting airways and to acinar units may be calculated by a one-dimensional (ID) computational fluid dynamics (CFD) model. With the simulated airflow field, deposition fractions may be calculated using deposition probability formulae adjusted with an enhancement factor to account for the effects of transient secondary flow and realistic airway geometry.

Abstract: A movable dust collection device includes a processing table, a processing machine, and a collection unit. By the movable suction box, the dust, small parts and debris under the processing gun can be directly sucked and collected. The control unit controls the motor to drive the driving wheels to move the suction box beyond the processing table, which facilitates the cleaning of the small parts and debris, and improves the shortcoming of lifting the entire collection board for cleaning in the prior art.

Abstract: A structural and functional model for a lung or similar organ is virtually defined by encoding aspects of branching passageways. Larger passageways that are visible in medical images are surface mesh fitted to the anatomical surface geometry. Smaller distal passageways, beyond a given number of branch generations, are modeled by inference as linear passages with nominal diameters and branching characteristics, virtually filling the space within the outer envelope of the organ. The model encodes finite volumetric elements for elasticity and compliance in passageway walls, and for local pressure and flow conditions in passageway lumens during respiration. The modeling can assess organ performance, help to plan surgery or therapy, determine likely particle deposition, assess respiratory pharmaceutical dosing, and otherwise represent structural and functional organ parameters.

Abstract: A polishing pad conditioner for a chemical mechanical polishing apparatus and real-time monitoring method thereof. A conditioning head is supported for rotation at one end of a transverse beam. A drive assembly is coupled to the conditioning head to drive downward force to the conditioning head, and at least one sensor disposed on the transverse beam detects deflection of the transverse beam.

Abstract: A polishing pad conditioner for a chemical mechanical polishing apparatus and real-time monitoring method thereof. A conditioning head is supported for rotation at one end of a transverse beam. A drive assembly is coupled to the conditioning head to drive downward force to the conditioning head, and at least one sensor disposed on the transverse beam detects deflection of the transverse beam.

Abstract: A novel apparatus and method for calibrating the gap distance between adjacent scrubber brushes with the frictional force of the brushes against a wafer, is disclosed. The apparatus includes a support frame, at least one pair of load cells carried by the support frame, at least one test plate operably engaging the load cells, and at least one electronic indicator operably connected to the load cells, respectively, for indicating a force exerted on the load cells by the test plate. The method includes placing at least one test plate between the adjacent scrubber brushes, rotating the scrubber brushes against the test plate, determining the frictional force of each brush against the plate, and adjusting the gap distance between the brushes to obtain a desired frictional force for the scrubber cleaning of production wafers.