Abstract: A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.

Abstract: A data collection and analysis device that downloads and updates firmware from operation platforms and an operating method of the same are revealed. The device includes a core unit, a program conducting and loading unit connected to the core unit, a translation unit connected to the core unit and the program conducting and loading unit, and a communication interface connected to the program conducting and loading unit, and the translation unit. The core unit is connected to a transmission unit, a memory unit, an indicator light unit, and an input unit. Thus users don't need to buy different data collection and analysis devices and the equipment cost is dramatically reduced. Moreover, the device and various test equipment are registered and synchronized by various ways so that the testing and analysis process is more convenient. The security of firmware installed is ensured. Firmware debugging and confirmation time after debugging are reduced.

Abstract: A telescopic test bar structure comprises a circuit unit and a winding device within a main body, and a telescopic test bar connected externally to the main body. The winding device has a shaft, which has a slit provided at the center thereof, protruding from a housing. A reel disk is received within the housing. A receiving groove for winding a sensing wire is formed on the reel disk and an accommodation space for receiving an elastic element is formed on the reel disk. The inner end of the sensing wire is electrically connected with the circuit unit. A sensor element on the outer end of the sensing wire is connected to the telescopic test bar. This structure has the advantage of better operational convenience in extension and shortening of the test bar without wiring entanglement.

Abstract: This invention relates to a pressure gauge calibration method and a pressure gauge in which a container filled with mixture of saturated vapor and liquid, a contrast table of standard temperature versus saturated vapor properties, and a pressure gauge for measuring temperature and pressure is utilized. In implementation, the temperature sensing unit of the pressure gauge measures the temperature of the saturated vapor and the pressure sensing unit of the pressure gauge measures the pressure of the saturated vapor, then the values obtained are in contrast with the standard temperature versus saturated vapor properties. If error is happened, pressure gauge is adjusted to correct value which is interlinked to the processor to conduct the calibration of reference. In this manner, the pressure gauge calibration can be finished easily and quickly at the installation site.