Patents by Inventor Ching-Pin Lin

Ching-Pin Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11984422
    Abstract: In an embodiment, a method includes attaching a first package component to a first carrier, the first package component comprising: an aluminum pad disposed adjacent to a substrate; a sacrificial pad disposed adjacent to the substrate, the sacrificial pad comprising a major surface opposite the substrate, a protrusion of the sacrificial pad extending from the major surface; and a dielectric bond layer disposed around the aluminum pad and the sacrificial pad; attaching a second carrier to the first package component and the first carrier, the first package component being interposed between the first carrier and the second carrier; removing the first carrier; planarizing the dielectric bond layer to comprise a top surface being coplanar with the protrusion; and etching a portion of the protrusion.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Li-Hsien Huang, Yao-Chun Chuang, SyuFong Li, Ching-Pin Lin, Jun He
  • Publication number: 20230187315
    Abstract: An exemplary semiconductor structure includes a device substrate having a first side and a second side. A dielectric layer is disposed over the first side of the device substrate. A through via extends along a first direction through the dielectric layer and through the device substrate from the first side to the second side. The through via has a total length along the first direction and a width along a second direction that is different than the first direction. The total length is a sum of a first length of the through via in the dielectric layer and a second length of the through via in the device substrate. The first length is less than the second length. A guard ring is disposed in the dielectric layer and around the through via.
    Type: Application
    Filed: June 6, 2022
    Publication date: June 15, 2023
    Inventors: Min-Feng Ku, Yao-Chun Chuang, Cheng-Chien Li, Ching-Pin Lin
  • Publication number: 20230178589
    Abstract: An exemplary semiconductor structure includes a device substrate having a first side and a second side. A dielectric layer is disposed over the first side of the device substrate. A through via extends along a first direction through the dielectric layer and through the device substrate from the first side to the second side. A guard ring is disposed in the dielectric layer and around the through via. The guard ring includes metal layers stacked along the first direction. The metal layers include first sidewalls and second sidewall. The first sidewalls form an inner sidewall of the guard ring. An overlap between the first sidewalls of the metal layers is less than about 10 nm. The overlap is along a second direction different than the first direction.
    Type: Application
    Filed: June 3, 2022
    Publication date: June 8, 2023
    Inventors: Min-Feng Ku, Yao-Chun Chuang, Cheng-Chien Li, Ching-Pin Lin
  • Publication number: 20230045422
    Abstract: In an embodiment, a method includes attaching a first package component to a first carrier, the first package component comprising: an aluminum pad disposed adjacent to a substrate; a sacrificial pad disposed adjacent to the substrate, the sacrificial pad comprising a major surface opposite the substrate, a protrusion of the sacrificial pad extending from the major surface; and a dielectric bond layer disposed around the aluminum pad and the sacrificial pad; attaching a second carrier to the first package component and the first carrier, the first package component being interposed between the first carrier and the second carrier; removing the first carrier; planarizing the dielectric bond layer to comprise a top surface being coplanar with the protrusion; and etching a portion of the protrusion.
    Type: Application
    Filed: February 23, 2022
    Publication date: February 9, 2023
    Inventors: Li-Hsien Huang, Yao-Chun Chuang, SyuFong Li, Ching-Pin Lin, Jun He
  • Publication number: 20220376081
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Application
    Filed: August 4, 2022
    Publication date: November 24, 2022
    Inventors: I-Chih CHEN, Ru-Shang HSIAO, Ching-Pin LIN, Chih-Mu HUANG, Fu-Tsun TSAI
  • Patent number: 11437495
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: September 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Chih Chen, Ru-Shang Hsiao, Ching-Pin Lin, Chih-Mu Huang, Fu-Tsun Tsai
  • Publication number: 20220254739
    Abstract: A semiconductor article which includes a semiconductor substrate, a back end of the line (BEOL) wiring portion on the semiconductor substrate, a through silicon via and a guard ring. The semiconductor substrate is made of a semiconductor material. The BEOL wiring portion includes a plurality of wiring layers having electrically conductive wiring and electrical insulating material. The through silicon via provides a conductive path through the BEOL wiring portion and the semiconductor substrate. The guard ring surrounds the through silicon via in the BEOL wiring portion and in some embodiments in the semiconductor substrate.
    Type: Application
    Filed: September 21, 2021
    Publication date: August 11, 2022
    Inventors: Min-Feng KU, Yao-Chun CHUANG, Ching-Pin LIN, Cheng-Chien LI
  • Patent number: 11145760
    Abstract: A semiconductor structure includes an active semiconductor fin having a first height, a dummy semiconductor fin adjacent to the active semiconductor fin and having a second height less than the first height, an isolation structure between the active semiconductor fin and the dummy semiconductor fin, and a dielectric cap over the dummy semiconductor fin. The dielectric cap is separated from the active semiconductor fin.
    Type: Grant
    Filed: September 25, 2019
    Date of Patent: October 12, 2021
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., TSMC NANJING COMPANY, LIMITED
    Inventors: Kuan Jung Chen, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Sheng-Lin Hsieh
  • Publication number: 20210210616
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Application
    Filed: January 25, 2021
    Publication date: July 8, 2021
    Inventors: I-Chih CHEN, Ru-Shang HSIAO, Ching-Pin LIN, Chih-Mu HUANG, Fu-Tsun TSAI
  • Publication number: 20210066491
    Abstract: A semiconductor structure includes an active semiconductor fin having a first height, a dummy semiconductor fin adjacent to the active semiconductor fin and having a second height less than the first height, an isolation structure between the active semiconductor fin and the dummy semiconductor fin, and a dielectric cap over the dummy semiconductor fin. The dielectric cap is separated from the active semiconductor fin.
    Type: Application
    Filed: September 25, 2019
    Publication date: March 4, 2021
    Inventors: Kuan Jung CHEN, I-Chih CHEN, Chih-Mu HUANG, Ching-Pin LIN, Sheng-Lin HSIEH
  • Patent number: 10903336
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Grant
    Filed: November 5, 2018
    Date of Patent: January 26, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: I-Chih Chen, Ru-Shang Hsiao, Ching-Pin Lin, Chih-Mu Huang, Fu-Tsun Tsai
  • Publication number: 20190165126
    Abstract: A semiconductor device includes: first and second fin structures, disposed on a substrate, that respectively extend in parallel to an axis; a first gate feature that traverses the first fin structure to overlay a central portion of the first fin structure; a second gate feature that traverses the second fin structure to overlay a central portion of the second fin structure; a first spacer comprising: a first portion comprising two layers that respectively extend from sidewalls of the first gate feature toward opposite directions of the axis; and a second portion comprising two layers that respectively extend from sidewalls of the first portion of the first spacer toward the opposite directions of the axis; and a second spacer comprising two layers that respectively extend from sidewalls of the second gate feature toward the opposite directions of the axis.
    Type: Application
    Filed: November 5, 2018
    Publication date: May 30, 2019
    Inventors: I-Chih CHEN, Ru-Shang Hsiao, Ching-Pin Lin, Chih-Mu Huang, Fu-Tsun Tsai
  • Patent number: 10153278
    Abstract: A fin-type field effect transistor comprising a substrate, at least one gate stack, spacers and epitaxy material portions is described. The substrate has fins and insulators located between the fins, and the fins comprise channel portions and flank portions beside the channel portions, the flank portions and the channel portions of the fins are protruded from the insulators, the flank portions of the fins and the channel portions of the fins have substantially a same height from top surfaces of the insulators, and each of the flank portions of the fins has a top surface and side surfaces adjoining the top surface. The at least one gate stack is disposed over the substrate, disposed on the insulators and over the channel portions of the fins. The spacers are disposed on the side surfaces of the flank portions of the fins. The epitaxy material portions are located above the top surfaces of the flank portions of the fins.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: December 11, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sheng-Lin Hsieh, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Ru-Shang Hsiao, Ting-Chun Kuan
  • Patent number: 10056455
    Abstract: A semiconductor device including a substrate, a gate stack, a pair of insulator structures, and source/drain materials is provided. The substrate has a plurality of recesses, wherein the plurality of recesses defines a protruded portion of the substrate having a channel region, and the protruded portion has a first side surface and a second side surface opposite to the first side surface. The gate stack is disposed on the protruded portion of the substrate. The pair of insulator structures are disposed within the plurality of recesses and respectively covering parts of the first side surface and the second side surface of the protruded portion, wherein the channel region is uncovered by the pair of insulator structures. The source/drain materials are disposed on the substrate in the plurality of recesses and on two opposing sides of the channel region, wherein the source/drain materials cover the pair of insulator structures.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: August 21, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ting-Chun Kuan, I-Chih Chen, Chih-Mu Huang, Ching-Pin Lin, Fu-Tsun Tsai, Ru-Shang Hsiao
  • Patent number: 8846768
    Abstract: Novel Uses of small molecules, particularly, triterpenoids and ingol diterpenes isolated from Euphorbia neriifolia, are disclosed herein. The triterpenoids are useful as lead compounds for manufacturing a medicament or a pharmaceutical composition for treating cancer; whereas the ingol diterpenes are useful as lead compounds for manufacturing a medicament or a pharmaceutical composition for treating thrombocytopenia.
    Type: Grant
    Filed: August 27, 2012
    Date of Patent: September 30, 2014
    Assignee: Mackay Memorial Hospital
    Inventors: Yu-Jen Chen, Lie-Chwn Lin, Ching-Pin Lin
  • Publication number: 20140056995
    Abstract: Novel Uses of small molecules, particularly, triterpenoids and ingol diterpenes isolated from Euphorbia neriifolia, are disclosed herein. The triterpenoids are useful as lead compounds for manufacturing a medicament or a pharmaceutical composition for treating cancer; whereas the ingol diterpenes are useful as lead compounds for manufacturing a medicament or a pharmaceutical composition for treating thrombocytopenia.
    Type: Application
    Filed: August 27, 2012
    Publication date: February 27, 2014
    Applicant: Mackay Memorial Hospital
    Inventors: YU-JEN CHEN, Lie-Chwn Lin, Ching-Pin Lin