Patents by Inventor Ching-Shyong Shyu

Ching-Shyong Shyu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spraying method of a dispense system
    Patent number: 6612505
    Abstract: A spraying method of a dispense system for preventing residue, wherein a precise amount of stream fluid is supplied from a fluid supply through a main tube to a nozzle, and the precise amount of stream fluid is sprayed onto a surface of a wafer. A sub-tube system, which comprises a bypass valve and a pin hole is utilized to refill the fluid to a void. A metering valve is used as a suck-back system to retrieve the remaining fluid in the main tube and prevent residue from occurring.
    Type: Grant
    Filed: June 15, 2001
    Date of Patent: September 2, 2003
    Assignee: Winbond Electronics Corp.
    Inventor: Ching-Shyong Shyu
  • Spraying method of a dispense system
    Publication number: 20020153427
    Abstract: A spraying method of a dispense system for preventing residue, wherein a precise amount of stream fluid is supplied from a fluid supply through a main tube to a nozzle, and the precise amount of stream fluid is sprayed onto a surface of a wafer. A sub-tube system, which comprises a bypass valve and a pin hole is utilized to refill the fluid to a void. A metering valve is used as a suck-back system to retrieve the remaining fluid in the main tube and prevent residue from occurring.
    Type: Application
    Filed: June 15, 2001
    Publication date: October 24, 2002
    Inventor: Ching-Shyong Shyu