Abstract: A micro-rotating device has a rotor 200 (of diameter not more than 1.5 cm), a shaft 202 threaded through the rotor 200, and a shaft holder 207 for holding the shaft. The shaft holders are formed by etching an Si substrate 501 to form multiple shaft receiving openings 508. The rotors and shafts too are formed from respective Si substrates 301, 401. The rotors 200 are located over the shaft holders 207, and the shafts threaded through the rotors 200 into the openings 509 and attached there by a wafer bonding process. Then the substrate 501 is partitioned to give individual motor elements. Protrusions 206 extend from the rotor in the direction towards the stator to space the rotor from the shaft holder.

Abstract: A HDD system includes one or more MEMS spindle motors, and one or more magnetic heads. Each spindle motor includes a rotor 127, 210 and a stator 207. The rotor 127, 210 carries a film of magnetic film, and a head 211 is arranged to communicate data with the magnetic film. The rotors 127, 210 are formed by MEMS technology. Rotor elements 6 are formed within a substrate 4, and the substrate is subsequently cut to sigulate the rotor elements 6, and turn them into rotors 127, 210.