Patents by Inventor Ching-Yuan Hsu

Ching-Yuan Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV photomask and manufacturing method of the same
    Patent number: 12235573
    Abstract: A photomask and a method of manufacturing a photomask are provided. According to an embodiment, a method includes: providing a substrate; depositing a reflective layer including molybdenum layers and silicon layers over the substrate; depositing a capping layer over the reflective layer; depositing an absorption layer over the capping layer; and performing a treatment to form a border region including molybdenum silicide in the reflective layer.
    Type: Grant
    Filed: July 30, 2023
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Feng Yuan Hsu, Tran-Hui Shen, Ching-Hsiang Hsu
  • Power detecting circuit with fast power removing detection, electronic device and method thereof
    Publication number: 20130033116
    Abstract: A power detecting circuit with fast power removing detection is disclosed. The power detecting circuit comprises an isolating device, coupled between an external power source and an internal power source, for isolating the external power source, and the internal power source, and a comparator, coupled to the external power source, for determining if the external power source is removed, and accordingly generating a removing signal.
    Type: Application
    Filed: August 3, 2011
    Publication date: February 7, 2013
    Inventors: Ching-Yuan Hsu, Chin-Sen Chang