Patents by Inventor Chisato Kamiya
Chisato Kamiya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11640897Abstract: The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.Type: GrantFiled: September 4, 2017Date of Patent: May 2, 2023Assignee: Hitachi High-Technologies CorporationInventors: Ryo Hirano, Tsunenori Nomaguchi, Chisato Kamiya, Junichi Katane
-
Patent number: 11430630Abstract: The present invention realizes a composite charged particle beam apparatus capable of suppressing a leakage magnetic field from a pole piece forming an objective lens of an SEM with a simple structure. The charged particle beam apparatus according to the present invention obtains an ion beam observation image while passing a current to a first coil constituting the objective lens, and performs an operation of reducing the image shift by passing a current to a second coil with a plurality of current values, and determines a current to be passed to the second coil based on a difference between the operations.Type: GrantFiled: September 4, 2017Date of Patent: August 30, 2022Assignee: Hitachi High-Technologies CorporationInventors: Ryo Hirano, Tsunenori Nomaguchi, Chisato Kamiya, Junichi Katane
-
Publication number: 20200251304Abstract: The present invention provides a charged particle beam apparatus capable of efficiently reducing the effect of a residual magnetic field when SEM observation is performed. The charged particle beam apparatus according to the present invention includes a first mode for passing a direct current to a second coil after turning off a first coil, and a second mode for passing an alternating current to the second coil after turning off the first coil.Type: ApplicationFiled: September 4, 2017Publication date: August 6, 2020Inventors: Ryo HIRANO, Tsunenori NOMAGUCHI, Chisato KAMIYA, Junichi KATANE
-
Publication number: 20200219697Abstract: The present invention realizes a composite charged particle beam apparatus capable of suppressing a leakage magnetic field from a pole piece forming an objective lens of an SEM with a simple structure. The charged particle beam apparatus according to the present invention obtains an ion beam observation image while passing a current to a first coil constituting the objective lens, and performs an operation of reducing the image shift by passing a current to a second coil with a plurality of current values, and determines a current to be passed to the second coil based on a difference between the operations.Type: ApplicationFiled: September 4, 2017Publication date: July 9, 2020Inventors: Ryo HIRANO, Tsunenori NOMAGUCHI, Chisato KAMIYA, Junichi KATANE
-
Patent number: 7745787Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.Type: GrantFiled: February 15, 2008Date of Patent: June 29, 2010Assignee: Hitachi High-Technologies CorporationInventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato
-
Patent number: 7459683Abstract: There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.Type: GrantFiled: October 19, 2006Date of Patent: December 2, 2008Assignee: Hitachi High-Technologies CorporationInventors: Mine Araki, Shunya Watanabe, Chisato Kamiya, Mitsugu Sato, Atsushi Takane, Akinari Morikawa, Atsushi Miyaki, Toru Ishitani
-
Publication number: 20080290275Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.Type: ApplicationFiled: February 15, 2008Publication date: November 27, 2008Inventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato
-
Patent number: 7355177Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.Type: GrantFiled: August 7, 2006Date of Patent: April 8, 2008Assignee: Hitachi High-Technologies CorporationInventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato
-
Publication number: 20070085007Abstract: There is disclosed a charged particle beam device which judges whether or not an image based on a dark-field signal has an appropriate atomic number contrast. Input reference information, a bright-field image or a back-scattered electron image is compared with a dark-field image, and it is judged whether or not a correlation value between them or the dark-field image has a predetermined contrast. According to such a constitution, it is possible to obtain information by which it is judged whether or not the dark-field image has an appropriate atomic number contrast.Type: ApplicationFiled: October 19, 2006Publication date: April 19, 2007Inventors: Mine Araki, Shunya Watanabe, Chisato Kamiya, Mitsugu Sato, Atsushi Takane, Akinari Morikawa, Atsushi Miyaki, Toru Ishitani
-
Publication number: 20060284093Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.Type: ApplicationFiled: August 7, 2006Publication date: December 21, 2006Inventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato
-
Patent number: 7105816Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose. A dark-field detector is disposed closely to the objective lens magnetic pole. The microscope is provided with means for moving the dark-field detector along a light axis so as to control the scattering angle of each detected dark-field signal.Type: GrantFiled: January 7, 2004Date of Patent: September 12, 2006Assignee: Hitachi High-Technologies CorporationInventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato
-
Publication number: 20040183017Abstract: Disclosed here is a high resolution scanning electron microscope having an in-lens type objective lens. The microscope is structured so as to detect transmission electrons scattering at wide angles to observe high contrast STEM images according to each sample and purpose.Type: ApplicationFiled: January 7, 2004Publication date: September 23, 2004Inventors: Chisato Kamiya, Masahiro Akatsu, Mitsugu Sato