Patents by Inventor Chiu-Ching Lin

Chiu-Ching Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6306750
    Abstract: A process of forming a bond pad structure, with a roughened top surface topography, used to improve the bondability of a gold wire bond, to the underlying bond pad structure, has been developed. The process features the use of a tungsten mesh pattern, formed in an IMD layer, and located underlying the bond pad structure, while overlying, and contacting, an underlying upper level, metal interconnect structure. The use of a tungsten mesh pattern, in place of individual tungsten studs, results in the creation of isolated islands, of IMED, reducing the bonding force, experienced by the IMD shapes, during the subsequent gold wire bond procedure. In addition the tungsten mesh pattern is formed via partial filling of a mesh pattern opening, in the IMD layer, resulting in an indented, or notched top surface. This in turn allows a roughened top surface, for the overlying bond pad structure, to be created, resulting in improved bondability of the gold wire, to the roughened top surface of the bond pad structure.
    Type: Grant
    Filed: January 18, 2000
    Date of Patent: October 23, 2001
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Yung-Sheng Huang, Chiu-Ching Lin, Chun-Hung Lu, Ruey-Lian Hwang