Patents by Inventor Chiu-Jung Chiu
Chiu-Jung Chiu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230380296Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.Type: ApplicationFiled: August 4, 2023Publication date: November 23, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Jung Chiu, Ya-Sheng Feng, I-Ming Tseng, Yi-An Shih, Yu-Chun Chen, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Patent number: 11765983Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.Type: GrantFiled: October 24, 2022Date of Patent: September 19, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Jung Chiu, Ya-Sheng Feng, I-Ming Tseng, Yi-An Shih, Yu-Chun Chen, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Publication number: 20230040932Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.Type: ApplicationFiled: October 24, 2022Publication date: February 9, 2023Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Jung Chiu, Ya-Sheng Feng, I-Ming Tseng, Yi-An Shih, Yu-Chun Chen, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Patent number: 11515471Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.Type: GrantFiled: August 9, 2020Date of Patent: November 29, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Jung Chiu, Ya-Sheng Feng, I-Ming Tseng, Yi-An Shih, Yu-Chun Chen, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Patent number: 11476410Abstract: A semiconductor device includes a substrate having a magnetic random access memory (MRAM) region and a logic region, a first metal interconnection on the MRAM region, a second metal interconnection on the logic region, a stop layer extending from the first metal interconnection to the second metal interconnection, and a magnetic tunneling junction (MTJ) on the first metal interconnection. Preferably, the stop layer on the first metal interconnection and the stop layer on the second metal interconnection have different thicknesses.Type: GrantFiled: August 19, 2020Date of Patent: October 18, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Chun Chen, Yen-Chun Liu, Ya-Sheng Feng, Chiu-Jung Chiu, I-Ming Tseng, Yi-An Shih, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Patent number: 11239412Abstract: A semiconductor structure includes an electrode element with an upper surface. The upper surface includes at least one convex curved portion.Type: GrantFiled: November 18, 2019Date of Patent: February 1, 2022Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Chun Chen, Ya-Sheng Feng, Chiu-Jung Chiu
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Publication number: 20220029087Abstract: A semiconductor device includes a substrate having a magnetic random access memory (MRAM) region and a logic region, a first metal interconnection on the MRAM region, a second metal interconnection on the logic region, a stop layer extending from the first metal interconnection to the second metal interconnection, and a magnetic tunneling junction (MTJ) on the first metal interconnection. Preferably, the stop layer on the first metal interconnection and the stop layer on the second metal interconnection have different thicknesses.Type: ApplicationFiled: August 19, 2020Publication date: January 27, 2022Inventors: Yu-Chun Chen, Yen-Chun Liu, Ya-Sheng Feng, Chiu-Jung Chiu, I-Ming Tseng, Yi-An Shih, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Publication number: 20220013713Abstract: A method for fabricating semiconductor device includes the steps of forming an inter-metal dielectric (IMD) layer on a substrate, forming a trench in the IMD layer, forming a synthetic antiferromagnetic (SAF) layer in the trench, forming a metal layer on the SAF layer, planarizing the metal layer and the SAF layer to form a metal interconnection, and forming a magnetic tunneling junction (MTJ) on the metal interconnection.Type: ApplicationFiled: August 9, 2020Publication date: January 13, 2022Inventors: Chiu-Jung Chiu, Ya-Sheng Feng, I-Ming Tseng, Yi-An Shih, Yu-Chun Chen, Yi-Hui Lee, Chung-Liang Chu, Hsiu-Hao Hu
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Patent number: 11087812Abstract: A MRAM includes a plurality of memory cells, an operation unit, a voltage generator, and an input/output circuit. The operation unit includes multiple groups of memory cells among the plurality of memory cells. The voltage generator is configured to provide a plurality of control signals by voltage-dividing a voltage control signal and selectively output the plurality of control signals to the input/output circuit. The input/output circuit is configured to output a plurality of switching pulse signals to the multiple groups of memory cells according to the plurality of control signals, wherein each switching pulse signal differs in pulse width or level.Type: GrantFiled: July 16, 2020Date of Patent: August 10, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yi-Hui Lee, I-Ming Tseng, Chiu-Jung Chiu, Chung-Liang Chu, Yu-Chun Chen, Ya-Sheng Feng, Yi-An Shih, Hsiu-Hao Hu, Yu-Ping Wang
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Patent number: 11050017Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, in which the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.Type: GrantFiled: April 16, 2020Date of Patent: June 29, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Chun Chen, Ya-Sheng Feng, Chiu-Jung Chiu, Hung-Chan Lin
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Patent number: 11011575Abstract: A circuit selector of embedded magnetoresistive random access memory (EMRAM) includes a transistor comprising a source/drain terminal coupled to a first magnetic tunneling junction (MTJ) and a second MTJ, a gate terminal, and a drain/source terminal coupled to a voltage source. Preferably, the first MTJ includes a first free layer, a first barrier layer, and a first pinned layer, in which the first free layer is coupled to the source/drain terminal and the first pinned layer is coupled to a first circuit. The second MTJ includes a second free layer, a second barrier layer, and a second pinned layer, in which the second pinned layer is coupled to the source/drain terminal and the second free layer is coupled to a second circuit.Type: GrantFiled: October 17, 2019Date of Patent: May 18, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ya-Sheng Feng, Yu-Chun Chen, Chiu-Jung Chiu
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Publication number: 20210119111Abstract: A semiconductor structure includes an electrode element with an upper surface. The upper surface includes at least one convex curved portion.Type: ApplicationFiled: November 18, 2019Publication date: April 22, 2021Inventors: Yu-Chun CHEN, Ya-Sheng FENG, Chiu-Jung CHIU
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Publication number: 20210083002Abstract: A circuit selector of embedded magnetoresistive random access memory (EMRAM) includes a transistor comprising a source/drain terminal coupled to a first magnetic tunneling junction (MTJ) and a second MTJ, a gate terminal, and a drain/source terminal coupled to a voltage source. Preferably, the first MTJ includes a first free layer, a first barrier layer, and a first pinned layer, in which the first free layer is coupled to the source/drain terminal and the first pinned layer is coupled to a first circuit. The second MTJ includes a second free layer, a second barrier layer, and a second pinned layer, in which the second pinned layer is coupled to the source/drain terminal and the second free layer is coupled to a second circuit.Type: ApplicationFiled: October 17, 2019Publication date: March 18, 2021Inventors: Ya-Sheng Feng, Yu-Chun Chen, Chiu-Jung Chiu
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Patent number: 10797226Abstract: A magnetoresistive memory cell is provided including a substrate. An inter-layer dielectric layer is disposed on the substrate. A via structure is disposed in the inter-layer dielectric layer. A magnetic pinned layer is disposed on the via structure. A tunnel barrier layer is disposed on the magnetic pinned layer to cover a top and a sidewall of the magnetic pinned layer, wherein the tunnel barrier layer comprises a horizontal extending portion outward from a bottom of the sidewall. A magnetic free layer with a -like structure is disposed on the tunnel barrier layer, wherein the magnetic free layer is isolated from the magnetic pinned layer by the tunnel bather layer. A spacer is disposed on the sidewall of the magnetic free layer. The spacer extends to the inter-layer dielectric layer.Type: GrantFiled: October 1, 2018Date of Patent: October 6, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ya-Sheng Feng, Yu-Chun Chen, Chiu-Jung Chiu, Hung-Chan Lin
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Publication number: 20200243753Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, in which the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.Type: ApplicationFiled: April 16, 2020Publication date: July 30, 2020Inventors: Yu-Chun Chen, Ya-Sheng Feng, Chiu-Jung Chiu, Hung-Chan Lin
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Patent number: 10665772Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, wherein the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.Type: GrantFiled: November 1, 2018Date of Patent: May 26, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Chun Chen, Ya-Sheng Feng, Chiu-Jung Chiu, Hung-Chan Lin
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Patent number: 10629802Abstract: A magnetoresistance device is disclosed, comprising a bottom electrode, a magnetic tunneling junction (MTJ) disposed on the bottom electrode, a top electrode disposed on the magnetic tunneling junction, a first spacer disposed on the magnetic tunneling junction and covering a sidewall of the top electrode, and a second spacer disposed on the first spacer and conformally covering along a sidewall of the first spacer, a sidewall of the magnetic tunneling junction and a sidewall of the bottom electrode.Type: GrantFiled: October 31, 2018Date of Patent: April 21, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chiu-Jung Chiu, Yu-Chun Chen, Ya-Sheng Feng, Hung-Chan Lin
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Publication number: 20200111950Abstract: A semiconductor device includes a magnetic tunneling junction (MTJ) on a substrate, a first spacer on one side of the MTJ, and a second spacer on another side of the MTJ, wherein the first spacer and the second spacer are asymmetric. Specifically, the MTJ further includes a first bottom electrode disposed on a metal interconnection, a capping layer on the bottom electrode, and a top electrode on the capping layer, in which a top surface of the first spacer is even with a top surface of the top electrode and a top surface of the second spacer is lower than the top surface of the top electrode and higher than the top surface of the capping layer.Type: ApplicationFiled: November 1, 2018Publication date: April 9, 2020Inventors: Yu-Chun Chen, Ya-Sheng Feng, Chiu-Jung Chiu, Hung-Chan Lin
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Publication number: 20200106000Abstract: A magnetoresistance device is disclosed, comprising a bottom electrode, a magnetic tunneling junction (MTJ) disposed on the bottom electrode, a top electrode disposed on the magnetic tunneling junction, a first spacer disposed on the magnetic tunneling junction and covering a sidewall of the top electrode, and a second spacer disposed on the first spacer and conformally covering along a sidewall of the first spacer, a sidewall of the magnetic tunneling junction and a sidewall of the bottom electrode.Type: ApplicationFiled: October 31, 2018Publication date: April 2, 2020Inventors: Chiu-Jung Chiu, Yu-Chun Chen, Ya-Sheng Feng, Hung-Chan Lin
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Publication number: 20200075840Abstract: A magnetoresistive memory cell is provided including a substrate. An inter-layer dielectric layer is disposed on the substrate. A via structure is disposed in the inter-layer dielectric layer. A magnetic pinned layer is disposed on the via structure. A tunnel barrier layer is disposed on the magnetic pinned layer to cover a top and a sidewall of the magnetic pinned layer, wherein the tunnel barrier layer comprises a horizontal extending portion outward from a bottom of the sidewall. A magnetic free layer with a -like structure is disposed on the tunnel barrier layer, wherein the magnetic free layer is isolated from the magnetic pinned layer by the tunnel bather layer. A spacer is disposed on the sidewall of the magnetic free layer. The spacer extends to the inter-layer dielectric layer.Type: ApplicationFiled: October 1, 2018Publication date: March 5, 2020Applicant: United Microelectronics Corp.Inventors: Ya-Sheng Feng, Yu-Chun Chen, Chiu-Jung Chiu, Hung-Chan Lin