Patents by Inventor Chiukun Steven Lai

Chiukun Steven Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning of native oxide with hydrogen-containing radicals
    Patent number: 7604708
    Abstract: A substrate cleaning apparatus has a remote source to remotely energize a hydrogen-containing gas to form an energized gas having a first ratio of ionic hydrogen-containing species to radical hydrogen-containing species. The apparatus has a process chamber with a substrate support, an ion filter to filter the remotely energized gas to form a filtered energized gas having a second ratio of ionic hydrogen-containing species to radical hydrogen-containing species, the second ratio being different than the first ratio, and a gas distributor to introduce the filtered energized gas into the chamber.
    Type: Grant
    Filed: February 12, 2004
    Date of Patent: October 20, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Bingxi Sun Wood, Mark N. Kawaguchi, James S. Papanu, Roderick C. Mosely, Chiukun Steven Lai, Chien-Teh Kao, Hua Ai, Wei W. Wang