Patents by Inventor Chiun Da Shiue

Chiun Da Shiue has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
    Publication number: 20240043992
    Abstract: A method includes forming a first coating comprising amorphous rare earth metal-containing oxide on a surface of an article using a first atomic layer deposition (ALD) process that includes repeating a process of alumina deposition cycles followed by rare earth metal oxide deposition cycles N1 times. The method also includes forming a second coating comprising crystalline rare earth metal oxide on the first coating using a second ALD process. The method also includes forming a third coating comprising amorphous rare earth metal-containing oxide on the second coating using a third ALD process that includes repeating a process of alumina deposition cycles followed by rare earth metal oxide deposition cycles N2 times. The method also includes forming a fourth coating comprising crystalline rare earth metal oxide on the third coating using a fourth ALD process. In some embodiments, a ratio of N1 to N2 is between about 100 and about 150.
    Type: Application
    Filed: August 8, 2022
    Publication date: February 8, 2024
    Inventors: Ren-Guan Duan, Chen-Hsiang Lu, Chiun-Da Shiue, Chih-Kai Hu
  • Near-field optical disk having surface plasmon amplification by stimulated emission of radiation
    Patent number: 8709570
    Abstract: A near-field optical disk having surface plasmon amplification by stimulated emission of radiation (SPASER) is provided. The near-field optical disk having SPASER includes a transparent substrate, a first transparent dielectric thin film layer formed on the transparent substrate, a SPASER thin film layer formed on the first transparent dielectric thin film layer, a second transparent dielectric thin film layer formed on the SPASER thin film layer, a recording thin film layer formed on the second transparent dielectric thin film layer, and a third transparent dielectric thin film layer formed on the recording thin film layer.
    Type: Grant
    Filed: November 11, 2010
    Date of Patent: April 29, 2014
    Assignee: National Taiwan University
    Inventors: Din-Ping Tsai, Chiun-Da Shiue, Shih-Chiang Yen
  • NEAR-FIELD OPTICAL DISK HAVING SURFACE PLASMON AMPLIFICATION BY STIMULATED EMISSION OF RADIATION
    Publication number: 20110209165
    Abstract: A near-field optical disk having surface plasmon amplification by stimulated emission of radiation (SPASER) is provided. The near-field optical disk having SPASER includes a transparent substrate, a first transparent dielectric thin film layer formed on the transparent substrate, a SPASER thin film layer formed on the first transparent dielectric thin film layer, a second transparent dielectric thin film layer formed on the SPASER thin film layer, a recording thin film layer formed on the second transparent dielectric thin film layer, and a third transparent dielectric thin film layer formed on the recording thin film layer.
    Type: Application
    Filed: November 11, 2010
    Publication date: August 25, 2011
    Applicant: NATIONAL TAIWAN UNIVERSITY
    Inventors: Din-Ping Tsai, Chiun Da Shiue, Shih Chiang Yen