Abstract: A RF MEMS switch includes a substrate, a first electrode, a first insulating layer, a second insulating layer, a second electrode and a movable electrode. The first electrode is disposed on the substrate. The first insulating layer covers the first electrode. The second insulating layer covers a portion of the substrate. The second electrode is disposed in the second insulating layer and is located at a plane different from a plane of the first electrode. The movable electrode is partially disposed on a surface of the second insulating layer, and extends over the first electrode and the second electrode. A portion of the movable electrode not disposed on the surface of the second insulating layer is a movable portion. The second insulating layer has a gap exposing a space between the movable portion and the first insulating layer and a space between the movable portion and the second electrode.

Abstract: A multi-actuation MEMS switch for high frequency signals includes a substrate, a heater disposed on the substrate, a co-planar waveguide disposed on a lowest metal layer, and a movable membrane including at least two metal layers, and an dielectric layer disposed between the co-planar waveguide and the movable membrane. The movable membrane is a fixed-fixed beam structure with a center indentation. When heat is generated and conducted to the movable membrane or electrostatic force is generated between the movable membrane and the co-planar waveguide or both forces are generated, the movable membrane will bend toward the co-planar waveguide. The position of the movable membrane change capacitance on signal line for switching the RF signal.

Abstract: A multi-actuation MEMS switch for high frequency signals includes a substrate, a heater disposed on the substrate, a co-planar waveguide disposed on a lowest metal layer, and a movable membrane including at least two metal layers, and an dielectric layer disposed between the co-planar waveguide and the movable membrane. The movable membrane is a fixed-fixed beam structure with a center indentation. When heat is generated and conducted to the movable membrane or electrostatic force is generated between the movable membrane and the co-planar waveguide or both forces are generated, the movable membrane will bend toward the co-planar waveguide. The position of the movable membrane change capacitance on signal line for switching the RF signal.

Abstract: A closed-loop latent heat cooling method and a capillary force or non-nozzle module thereof are provided, wherein a cooling fluid in a storage tank flows to a gasification pipe via a liquid pipe; the gasification pipe connects with a capillary force or non-nozzle structure; the cooling fluid keeps a liquid thin film in the gasification pipe, and after absorbing the heat of electronic components, it keeps a thin film in a boiling state; then, it is gasified and rises to a vapor chamber more efficiently; the gasified cooling fluid in the vapor chamber flows to a condenser via a vapor pipe and flows back to the storage tank via the liquid pipe after condensed to be a liquid in the condenser.

Abstract: A compact spray cooling module is presented, which comprises: a storage tank, a spray chamber, a nebulizer, and a media of liquid transportation ability. The storage tank is used for storing a cooling liquid, and the spray chamber is connected to a heat source. Moreover, there is a nebulizer lay on the spray chamber, whereas the nebulizer is comprised of a piezoelectric plate and a micro-nozzle plate. The micro-nozzle plate has a large number of micro-nozzle disposed on it. Furthermore, the media located between the storage tank and the spray chamber has the capability of transporting the cooling liquid from storage tank to spray chamber by capillary attraction for the purpose of nebulizing the cooling liquid. Taking advantage of the latent heat from liquid phase change, the nebulized cooling liquid sprayed to the bottom of the spraying chamber can dissipate the heat generated from the heat source rapidly.