Patents by Inventor Chloe Hsu

Chloe Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of planarizating film
    Patent number: 9543161
    Abstract: A method of fabricating a semiconductor device is disclosed. The method includes forming a flowable-material (FM) layer over a substrate. The substrate has a first region and a second region. A top surface of the FM layer in the first region is higher than a top surface of the FM layer in the second region. The method also includes forming a plurality of trenches in the FM layer in the first region and performing annealing process to reflow the FM layer, wherein the plurality of trenches are filled with the FM layer.
    Type: Grant
    Filed: February 10, 2016
    Date of Patent: January 10, 2017
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ying-Hao Su, Yu-Lun Liu, Chi-Kang Chang, Shih-Chi Fu, Kuei-Shun Chen, Chloe Hsu