Patents by Inventor Chol-Min JHON

Chol-Min JHON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of measuring a substrate and method of manufacturing a semiconductor device using the same
    Patent number: 9716047
    Abstract: A method for measuring a substrate is provided. The method comprises irradiating a measurement beam into a site box of an identifiable pattern of a substrate, detecting a center position of the irradiated measurement beam, calculating an amount of shift of the center position of the measurement beam from the center position of the site box, and correcting the center position of the measurement beam to the center position of the site box by compensating the calculated amount of shift.
    Type: Grant
    Filed: July 24, 2016
    Date of Patent: July 25, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chol-Min Jhon, Seok Park, Ho-Hyung Jung, Yang-Kyu Kim, Jae-Young Lee
  • METHOD OF MEASURING A SUBSTRATE AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20170103925
    Abstract: A method for measuring a substrate is provided. The method comprises irradiating a measurement beam into a site box of an identifiable pattern of a substrate, detecting a center position of the irradiated measurement beam, calculating an amount of shift of the center position of the measurement beam from the center position of the site box, and correcting the center position of the measurement beam to the center position of the site box by compensating the calculated amount of shift.
    Type: Application
    Filed: July 24, 2016
    Publication date: April 13, 2017
    Inventors: Chol-Min JHON, Seok PARK, Ho-Hyung JUNG, Yang-Kyu KIM, Jae-Young LEE
  • Load port module
    Patent number: 9543179
    Abstract: A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: January 10, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chol-Min Jhon, Ho-Hyung Jung, Sung-Sick An, Yong-Chul Lee, Mi-Jung Jeon
  • LOAD PORT MODULE
    Publication number: 20140325772
    Abstract: A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.
    Type: Application
    Filed: February 28, 2014
    Publication date: November 6, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Chol-Min JHON, Ho-Hyung JUNG, Sung-Sick AN, Yong-Chul LEE, Mi-Jung JEON