Abstract: In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade connected to the wrist plate to support a second substrate, wherein the second blade is adjacent to the first blade. An elevating unit moves the first blade upward to allow the first blade to support the first substrate and moves the first blade downward to allow the second blade to support the second substrate.

Abstract: In a substrate transfer robot, an end effector includes a wrist plate, a first blade movably connected to the wrist plate in a vertical direction to support a first substrate, and a second blade connected to the wrist plate to support a second substrate, wherein the second blade is adjacent to the first blade. An elevating unit moves the first blade upward to allow the first blade to support the first substrate and moves the first blade downward to allow the second blade to support the second substrate.

Abstract: In a nozzle assembly for supplying processing solutions, the nozzle assembly includes a housing, a plurality of supply units arranged in the housing and through which different processing solutions flow onto the substrate, and a plurality of nozzles connected to the supply units, respectively, in such a configuration that a first nozzle selected from the nozzles is directed to the substrate and the remaining nozzles excluding the first nozzle are directed away from the substrate. Accordingly, the mechanical structure of the nozzle assembly may be simplified and the nozzles directed away from the substrate may be prevented from being contaminated by the processing solutions that are injected onto the substrate through the nozzle directed to the substrate.