Abstract: A monolithic tri-axis anisotropic magnetoresistive (AMR) sensor and the method of manufacturing of the AMR sensor are presented. In one embodiment, the monolithic tri-axis AMR sensor includes (a) a substrate, (b) a first horizontal direction sensor disposed on the substrate, (c) a second horizontal direction sensor disposed on the substrate, (d) a third horizontal direction sensor disposed on the substrate, and (e) a flux concentrator disposed on the third horizontal direction sensor, wherein the flux concentrator is in cooperation with the third horizontal direction sensor to realize a function of a Z-axis sensor, such that the Z-axis direction can be effectively measured. The integration of the tri-axis AMR sensor is therefore accomplished. In addition, the integrated tri-axis AMR sensor has low production cost and improved reliability.

Abstract: A hard protective material and method for forming the medium having the formula C.sub.x N.sub.y. The medium may be formed as a protective film on a magnetic recording disk in a sputtering apparatus such as a magnetron apparatus. The amount of nitrogen in the film may be affected by controlling the collisions of the sputtered material between the target and deposition substrate by controlling the bombardment of the substrate by electrons. The films exhibit properties indicative of a textured morphology on a nanoscale which enhances the retention of lubricant overcoats.