Patents by Inventor Chooi-Wan Ng

Chooi-Wan Ng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for compensating effect of patterning process and apparatus thereof
    Patent number: 8578303
    Abstract: A method for compensating an effect of a patterning process is illustrated. The main concept of the method for compensating the effect of the patterning process is to add or subtract the correction amounts for all segments according to the set of the comparison values at the set of the evaluation points. Compared with the delta-chrome optical proximity correction method, the run time of the method for compensating the effect of the patterning process is reduced, the memory usage of the method for compensating the effect of the patterning process not increased, and the correction accuracy of the method for compensating the effect of the patterning process is not reduced.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: November 5, 2013
    Assignee: National Taiwan University
    Inventors: Kuen-Yu Tsai, Chooi-Wan Ng, Yi-Sheng Su