Patents by Inventor Choon Chua

Choon Chua has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for measuring laser induced phenomena changes in a semiconductor device
    Publication number: 20060284625
    Abstract: A method and system for measuring laser induced phenomena changes of at least one of a resistance, a capacitance and an inductance in a semiconductor device. The method comprises interconnecting an electrical bridge circuit across the semiconductor device, the semiconductor device being connected as one of at least four circuit elements of the bridge circuit; inducing the changes in the semiconductor; and monitoring a balance condition of the bridge circuit.
    Type: Application
    Filed: June 21, 2005
    Publication date: December 21, 2006
    Applicant: SEMICAPS Pte Ltd
    Inventors: Choon Chua, Lian Koh, Hoo Ng, Jacob Phang, Soon Tan
  • Seasoning process for a deposition chamber
    Publication number: 20060189171
    Abstract: A seasoning process for a deposition chamber, the process comprising providing a silicon-containing seasoning gas inside the deposition chamber; and forming a silicon-based seasoning film on at least one surface inside the deposition chamber, the seasoning film having a refractive index of about 1.48 or more.
    Type: Application
    Filed: February 23, 2005
    Publication date: August 24, 2006
    Inventors: Choon Chua, Lee Kang, Chee Foo