Abstract: A semiconductor tool includes an illumination source to generate an illumination beam, one or more illumination optical elements to direct a portion of the illumination beam to a sample, a detector, one or more collection optical elements to direct radiation emanating from the sample to the detector, and a controller communicatively coupled to the detector. The controller is configured to measure alignment at a plurality of locations across the sample to generate alignment data, select an analysis area for alignment zone determination, divide the analysis area into two or more alignment zones having different alignment signatures; model the alignment data of at least a first alignment zone of the two or more alignment zones using a first alignment model, and model the alignment data of at least a second alignment zone of the two or more alignment zones using a second alignment model different than the first alignment model.

Abstract: A semiconductor tool includes an illumination source to generate an illumination beam, one or more illumination optical elements to direct a portion of the illumination beam to a sample, a detector, one or more collection optical elements to direct radiation emanating from the sample to the detector, and a controller communicatively coupled to the detector. The controller is configured to measure alignment at a plurality of locations across the sample to generate alignment data, select an analysis area for alignment zone determination, divide the analysis area into two or more alignment zones having different alignment signatures; model the alignment data of at least a first alignment zone of the two or more alignment zones using a first alignment model, and model the alignment data of at least a second alignment zone of the two or more alignment zones using a second alignment model different than the first alignment model.

Abstract: A system for characterizing interruption defect induced efficiency loss in a photovoltaic cell includes an inspection system configured to acquire inspection data from a photovoltaic cell, a control system configured to: receive the inspection data acquired from the photovoltaic cell, identify one or more interruption defects in one or more fingers of an electrode of the one photovoltaic cell utilizing the inspection data, determine a spatial parameter associated with at least one of the identified interruption defects and one or more floating finger portions of the one or more fingers created by two or more identified interruption defects, determine an interruption-defect-induced efficiency loss of the photovoltaic cell based on the determined spatial parameter associated with the at least one of the identified interruption defects and the floating finger portions of the one or more fingers created by two or more identified interruption defects.