Abstract: Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed.

Abstract: Provided are a photonic-crystal plate that forms an optical waveguide and an optical device assembly using the same, and more particularly, a vertical-type photonic-crystal plate and an optical device assembly configured to be easily integrated with surface-emitting light source devices and surface-receiving light detector devices. The photonic-crystal plate includes a plurality of cylindrical through holes formed in a thickness direction and arranged in a periodic crystal lattice structure. The plate further includes: a main crystal lattice defect that forms a main optical waveguide for passing lights in a direction perpendicular to the photonic-crystal plate; and a sub-crystal lattice defect that forms a sub-optical waveguide for causing light in a specific wavelength band among the lights passing through the main optical waveguide to be optically coupled and passing the coupled light in the direction perpendicular to the photonic-crystal plate.

Abstract: A method for fabricating a metal micro heat pipe with a polygonal cross-section to allow working fluid to flow by capillary force generated at edges of the polygonal of the micro heat pipe. The polygonal cross-section is formed of a single metal layer via a single drawing process. The micro heat pipe is formed of a single metal plate.

Abstract: Provided is a micro gas sensor including: a substrate; an open cavity and electrode pad separation grooves formed on the substrate; a plurality of electrode pads formed on an upper portion of the substrate and electrically insulated from each other by the electrode pad separation grooves; a micro heater connected to a plurality of the electrode pads by a bridge structure and suspended on the open cavity; a plurality of sensing electrodes formed on the same plane between the micro heater and a plurality of the electrode pads in a cantilever array and suspended on the open cavity; and a gas sensing film formed to be hung down between microelectrode finger spacings of a plurality of the sensing electrodes to represent changes in characteristics according to a gas concentration by contacting surfaces of the micro heater and a plurality of the sensing electrodes.

Abstract: Provided is a method for manufacturing a floating structure of a MEMS. The method for manufacturing a floating structure of a microelectromechanical system (MEMS), comprising the steps of: a) forming a sacrificial layer including a thin layer pattern doped with impurities on a substrate; b) forming a support layer on the sacrificial layer; c) forming a structure to be floated on the support layer by using a subsequent process; d) forming an etch hole exposing both side portions of the thin layer pattern; and e) removing the sacrificial layer through the etch hole to form an air gap between the support layer and the substrate.

Abstract: Provided is a flat plate-type heat pipe formed of a flat pipe having a predetermined through-hole formed therein and a plurality of grooves extending from an inner surface of the through-hole in a longitudinal direction so that, while the interior of the heat pipe is in a vacuum state, heat in the heat pipe is discharged to the exterior due to a phase change of between liquid and gaseous states of working fluid and the working fluid flows by a capillary force produced from the plurality of grooves, whereby it is possible to obtain a strong capillary force and an excellent cooling effect while it is manufactured through a simple process.

Abstract: Provided are a photonic-crystal plate that forms an optical waveguide and an optical device assembly using the same, and more particularly, a vertical-type photonic-crystal plate and an optical device assembly configured to be easily integrated with surface-emitting light source devices and surface-receiving light detector devices. The photonic-crystal plate includes a plurality of cylindrical through holes formed in a thickness direction and arranged in a periodic crystal lattice structure. The plate further includes: a main crystal lattice defect that forms a main optical waveguide for passing lights in a direction perpendicular to the photonic-crystal plate; and a sub-crystal lattice defect that forms a sub-optical waveguide for causing light in a specific wavelength band among the lights passing through the main optical waveguide to be optically coupled and passing the coupled light in the direction perpendicular to the photonic-crystal plate.

Abstract: Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.

Abstract: A light source having a photodetector embedded in a light pipe is disclosed. The light pipe includes a layer of transparent material having top and bottom surfaces and first and second opposing side surfaces that intersect the top and bottom surfaces. In one embodiment, the photodetector is embedded in the layer at a location that is adjacent to the second side surface and a plurality of light emitters are positioned so as to couple light into the layer of material through the first side edge at angles less than or equal to the critical angle for the layer of material. The bottom surface can include protrusions for scattering light toward the top surface. A controller adjusts the intensity of the various light emitters in response to changes in light intensity detected by the photodetector. Light leaving the top surface of the light pipe can be used to illuminate a display.

Abstract: In one embodiment, apparatus is provided with a light source, an optic element, at least one photosensor, and a control system. The optic element has a reflective material on a surface thereof, and is positioned to receive and reflect light emitted by the light source. The at least one photosensor is mounted to the surface of the optic element on which the reflective material resides, over a portion of the optic element on which the reflective material does not reside. The control system is operably associated with both the photosensor(s) and the light source, to regulate the light source's light output in accordance with measurements received from the photosensor(s).

Abstract: A display and method for displaying data are disclosed. The display includes a light source and a gauge that displays a quantity. The gauge is illuminated by the light source that has a color specified by a first control signal. A controller generates the first control signal based on the quantity such that the light source generates light of a first color if the quantity is within a first range and light of a second color if the quantity is in a second range. In one embodiment, the light source is characterized by an intensity specified by a second control signal, and the controller generates a second control signal based on the quantity such that the light intensity has a first intensity value when the quantity is in a third range and a second intensity value when the quantity is in a fourth range.

Abstract: An LED-based light system includes a primary light source and at least one redundant light source. The primary light source is activated by itself and the performance of the light source is measured to determine whether nor not to drive the redundant light source. The redundant light source is activated when the performance measurements indicate that a performance characteristic is not being met by the primary light source alone. The first light system can be activated in combination with the redundant light source once the decision is made to activate the redundant light source.

Abstract: Light is mixed within a mixing cavity. Light is transported from the mixing cavity, through an optical cable, to a color sensor. The transported light is sampled by the color sensor. Light color within the mixing cavity is controlled based on information from the transported light sampled by the color sensor.

Abstract: A micro heat pipe with a polygonal cross-section is manufactured via drawing. The micro heat pipe has flat or concave sides to allow working fluid to flow by capillary force generated at the edges of the micro heat pipe. Another micro heat pipe is manufactured by forming a plurality of through holes with a polygonal cross-section in a metal plate via extrusion, in which each of the through holes has flat or concave sides to allow working fluid to flow by capillary force generated at the edges of each of the through holes. The micro heat pipes can be manufactured easily via drawing or extrusion, can induce strong capillary force through simple structural modifications, and provide superior cooling effects.