Abstract: Sound signal processing apparatuses and methods of operating the same are provided. The sound signal processing apparatus includes: a band separator configured to separate sound signals into frequency bands; an adder configured to add sound signals; and a signal processor that is arranged between the band separator and the adder and comprises a plurality of signal processing blocks. The band separator includes elements for separating the sound signals into frequency bands, and the elements correspond one to one to the signal processing blocks.

Abstract: A spatial audio recording device includes: a plurality of directional vibrating bodies arranged such that at least one of the plurality of directional vibrating bodies selectively reacts according to a direction of input audio; a non-directional vibrating body configured to react regardless of the direction of the input audio; a read-out circuit configured to output a directional audio signal including a plurality of channels based on reactions of the directional vibrating bodies and a non-directional audio signal based on a reaction of the non-directional vibrating body; and a processor configured to correct the directional audio signal based on the non-directional audio signal.

Abstract: Provided is a plasma dicing method. The plasma dicing method includes: performing plasma etching on a first surface of a substrate exposed between a plurality of membrane structures; forming a passivation layer on a semiconductor wafer to cover the plurality of membrane structures and at least one trench; performing plasma etching on a second surface of the substrate such that a through hole exposing a portion of the plurality of membrane structures and a dicing lane connected to the trench and having a width less than a width of the through hole are formed at the substrate; and removing the passivation layer and singulating the semiconductor wafer into a plurality of devices including a membrane partially exposed by the through hole.

Abstract: Provided is a plasma dicing method. The plasma dicing method includes: performing plasma etching on a first surface of a substrate exposed between a plurality of membrane structures; forming a passivation layer on a semiconductor wafer to cover the plurality of membrane structures and at least one trench; performing plasma etching on a second surface of the substrate such that a through hole exposing a portion of the plurality of membrane structures and a dicing lane connected to the trench and having a width less than a width of the through hole are formed at the substrate; and removing the passivation layer and singulating the semiconductor wafer into a plurality of devices including a membrane partially exposed by the through hole.

Abstract: Sound signal processing apparatuses and methods of operating the same are provided. The sound signal processing apparatus includes: a band separator configured to separate sound signals into frequency bands; an adder configured to add sound signals; and a signal processor that is arranged between the band separator and the adder and comprises a plurality of signal processing blocks. The band separator includes elements for separating the sound signals into frequency bands, and the elements correspond one to one to the signal processing blocks.

Abstract: Disclosed are a directional acoustic sensor, a method of adjusting directional characteristics using the directional acoustic sensor, and a method of attenuating an acoustic signal in a specific direction using the directional acoustic sensor. The directional acoustic sensor includes a plurality of resonance units arranged to have different directionalities and a signal processor configured to adjust directional characteristics by calculating at least one of a sum of and a difference between outputs of the resonance units. In this state, the signal processor attenuates an acoustic signal in a specific direction by using a plurality of directional characteristics obtained by calculating at least one of the sum of and the difference between the outputs of the resonance units at a certain ratio.

Abstract: Provided are sound direction detection sensors capable of detecting an input direction of sound and electronic apparatuses including the same. A sound direction detection sensor includes a sound inlet receiving input sound, a sound outlet outputting the sound input through the sound inlet, and a plurality of directional vibrators arranged between the sound inlet and the sound outlet in such a manner that at least one directional vibrator selectively reacts based on a direction of the sound input through the sound inlet, wherein a direction perpendicular to a direction of a directional vibrator having a lowest output in magnitude among the plurality of directional vibrators is determined as an input direction of the sound.

Abstract: Provided is a sound direction detection sensor capable of detecting a direction from which sound is coming by using a multi-resonator array. The disclosed sound direction detection sensor includes two resonator arrays, each including a plurality of resonators having different resonance frequencies. The two resonator arrays have different directivities. Each resonator array serves as an audio sensor, and the sound direction detection sensor detects a direction from which sound is incident, regardless of a distance between audio sensors.

Abstract: Provided is an integrated circuit including an analog-to-digital converter (ADC) configured to convert an analog signal to a digital signal; and a digital signal processor (DSP) configured to process the digital signal, wherein the ADC generates a power source during a process for converting the analog signal into the digital signal and supplies power to the DSP through the power source.

Abstract: Provided are a sound source separation apparatus and a sound source separation method. The sound source separation apparatus includes a plurality of directional vibrators configured such that one or more of the plurality of directional vibrators react to a sound based on a direction of the sound. The sound source separation apparatus is configured to determine directions of a first sound source and a second sound source that are different from each other, based on strengths of output signals of the plurality of directional vibrators, and select a first directional vibrator and a second directional vibrator that are different from each other from among the plurality of directional vibrators to separately obtain a sound coming from the first sound source and a sound coming from the second sound source.

Abstract: A piezoelectric micromechanical resonator includes a supporting beam including a fixed edge that is fixed to a supporting member and a free edge opposite the fixed edge, a piezoelectric sensor including an edge attached to the supporting member, the piezoelectric sensor further including a lower electrode, a piezoelectric unit, and an upper electrode sequentially stacked on a surface of the supporting beam, and a lumped mass provided on the surface of the supporting beam at a side of the supporting beam including the free edge, the upper electrode having a Young's modulus smaller than a Young's modulus of the lower electrode.

Abstract: Provided are sound direction detection sensors capable of detecting an input direction of sound and electronic apparatuses including the same.

Abstract: Provided are a resonator, a method of manufacturing the resonator, and a strain sensor and a sensor array including the resonator. The resonator is provided to extend in a lengthwise direction from a support. The resonator includes a single crystal material and is provided to extend in a crystal orientation that satisfies at least one from among a Young's modulus and a Poisson's ratio, from among crystal orientations of the single crystal material.

Abstract: A capacitor structure includes at least one first layer and at least one second layer that are alternately stacked. The at least one first layer includes first electrodes and second electrodes alternately arranged in a first direction, and the at least one second layer includes third electrodes and fourth electrodes alternately arranged in a second direction intersecting the first direction, the third electrodes and the fourth electrodes being electrically connected to the first electrodes and the second electrodes. Each of the first electrodes and the second electrodes includes a base portion and branch portions protruding from the base portion, and the third electrodes and the fourth electrodes are arranged side by side to correspond to the branch portions.

Abstract: Provided is an integrated circuit including an analog-to-digital converter (ADC) configured to convert an analog signal to a digital signal; and a digital signal processor (DSP) configured to process the digital signal, wherein the ADC generates a power source during a process for converting the analog signal into the digital signal and supplies power to the DSP through the power source.

Abstract: A spatial audio recording device includes: a plurality of directional vibrating bodies arranged such that at least one of the plurality of directional vibrating bodies selectively reacts according to a direction of input audio; a non-directional vibrating body configured to react regardless of the direction of the input audio; a read-out circuit configured to output a directional audio signal including a plurality of channels based on reactions of the directional vibrating bodies and a non-directional audio signal based on a reaction of the non-directional vibrating body; and a processor configured to correct the directional audio signal based on the non-directional audio signal.

Abstract: Provided are a sound source separation apparatus and a sound source separation method. The sound source separation apparatus includes a plurality of directional vibrators configured such that one or more of the plurality of directional vibrators react to a sound based on a direction of the sound. The sound source separation apparatus is configured to determine directions of a first sound source and a second sound source that are different from each other, based on strengths of output signals of the plurality of directional vibrators, and select a first directional vibrator and a second directional vibrator that are different from each other from among the plurality of directional vibrators to separately obtain a sound coming from the first sound source and a sound coming from the second sound source.

Abstract: Provided are resonators, a resonator system including the resonators, and a method of manufacturing the resonators. The resonator includes a vibration beam configured to vibrate in response to an external signal, a sensing unit configured to detect the movement of the vibration beam, and a lumped mass unit including a base unit that contacts the vibration beam and a wing unit arranged separately from the vibration beam on the base unit.

Abstract: Provided are sound direction detection sensors capable of detecting an input direction of sound and electronic apparatuses including the same. A sound direction detection sensor includes a sound inlet receiving input sound, a sound outlet outputting the sound input through the sound inlet, and a plurality of directional vibrators arranged between the sound inlet and the sound outlet in such a manner that at least one directional vibrator selectively reacts based on a direction of the sound input through the sound inlet, wherein a direction perpendicular to a direction of a directional vibrator having a lowest output in magnitude among the plurality of directional vibrators is determined as an input direction of the sound.

Abstract: A spectrum analyzer includes: a support substrate; and a plurality of resonators that have center frequencies different from each other, one end of each of the plurality of resonators being fixed to the support substrate. The plurality of resonators are arranged so that an interval between resonators having adjacent center frequencies is secured by a certain value or greater, thus reducing coupling and increasing analysis accuracy.