Patents by Inventor Chorng Shry Niou

Chorng Shry Niou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR TREATMENT OF SAMPLES FOR AUGER ELECTRONIC SPECTROMETER (AES) IN THE MANUFACTURE OF INTEGRATED CIRCUITS
    Publication number: 20110168554
    Abstract: An apparatus for treatment of a sample for the manufacture of integrated circuits includes a holder apparatus and a stage which is coupled to the holder apparatus. The stage is capable of holding a portion of a sample to be analyzed. The apparatus also includes a shield that is operably coupled to the stage to block a portion of the sample. The shield is capable of movement relative to the sample to block one or more portions of the sample. The shield is provided on a track member and is movable from a first spatial location to a second spatial location on the track member. The apparatus further includes an enclosure surrounding an entirety of the sample and the shield.
    Type: Application
    Filed: March 24, 2011
    Publication date: July 14, 2011
    Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
    Inventors: QI HAU ZHANG, Ming Li, Chorng Shry Niou, Scott Liao