Patents by Inventor Chou-Ting Tsai

Chou-Ting Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PVD equipment and electrode and deposition ring thereof
    Publication number: 20060219172
    Abstract: A deposition ring comprises a ring body, a groove and a protrusion structure. The ring body is planar-ring shaped, and comprises a first surface. The groove and the protrusion structure are ring shaped and formed on the first surface. The protrusion structure is close to the groove and near an outer side of the ring body. The groove comprises a first side wall, a second side wall and a bottom. A curvature radius of the first side wall is larger than a curvature radius of the second side wall. The second side wall is a continuous ring shaped wall. The bottom is formed between the first side wall and the second side wall.
    Type: Application
    Filed: April 5, 2005
    Publication date: October 5, 2006
    Inventors: Yu-Yuan Kuo, Shuo-Yen Tai, Chou-Ting Tsai, Ming-Te More, Kuo-Hsien Cheng, G. H. Tseng