Patents by Inventor Chris Carlson

Chris Carlson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8603877
    Abstract: Some embodiments include dielectric structures. The structures include first and second portions that are directly against one another. The first portion may contain a homogeneous mixture of a first phase and a second phase. The first phase may have a dielectric constant of greater than or equal to 25, and the second phase may have a dielectric constant of less than or equal to 20. The second portion may be entirely a single composition having a dielectric constant of greater than or equal to 25. Some embodiments include electrical components, such as capacitors and transistors, containing dielectric structures of the type described above. Some embodiments include methods of forming dielectric structures, and some embodiments include methods of forming electrical components.
    Type: Grant
    Filed: May 1, 2012
    Date of Patent: December 10, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Noel Rocklein, Chris Carlson, Dave Peterson, Cunyu Yang, Praveen Vaidyanathan, Vishwanath Bhat
  • Patent number: 8564095
    Abstract: Methods of forming a capacitor including forming at least one aperture in a support material, forming a titanium nitride material within the at least one aperture, forming a ruthenium material within the at least one aperture over the titanium nitride material, and forming a first conductive material over the ruthenium material within the at least one aperture. The support material may then be removed and the titanium nitride material may be oxidized to form a titanium dioxide material. A second conductive material may then be formed over an outer surface of the titanium dioxide material. Capacitors, semiconductor devices and methods of forming a semiconductor device including the capacitors are also disclosed.
    Type: Grant
    Filed: February 7, 2011
    Date of Patent: October 22, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Tsai-Yu Huang, Vishwanath Bhat, Vassil Antonov, Chun-I Hsieh, Chris Carlson
  • Publication number: 20130260529
    Abstract: Methods of forming a capacitor including forming at least one aperture in a support material, forming a titanium nitride material within the at least one aperture, forming a ruthenium material within the at least one aperture over the titanium nitride material, and forming a first conductive material over the ruthenium material within the at least one aperture. The support material may then be removed and the titanium nitride material may be oxidized to form a titanium dioxide material. A second conductive material may then be formed over an outer surface of the titanium dioxide material.
    Type: Application
    Filed: May 28, 2013
    Publication date: October 3, 2013
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Tsai-Yu Huang, Vishwanath Bhat, Vassil Antonov, Chun-I Hsieh, Chris Carlson
  • Patent number: 8518486
    Abstract: Some embodiments include methods of forming rutile-type titanium oxide. A monolayer of titanium nitride may be formed. The monolayer of titanium nitride may then be oxidized at a temperature less than or equal to about 550° C. to convert it into a monolayer of rutile-type titanium oxide. Some embodiments include methods of forming capacitors that have rutile-type titanium oxide dielectric, and that have at least one electrode comprising titanium nitride. Some embodiments include thermally conductive stacks that contain titanium nitride and rutile-type titanium oxide, and some embodiments include methods of forming such stacks.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: August 27, 2013
    Assignee: Micron Technology, Inc.
    Inventors: Nik Mirin, Tsai-Yu Huang, Vishwanath Bhat, Chris Carlson, Vassil Antonov
  • Publication number: 20130208403
    Abstract: A capacitor structure includes a storage node; a capacitor dielectric on the storage node; and a plate electrode on the capacitor dielectric. The capacitor dielectric may include a Si-doped ZrO2 layer or crystalline ZrSiOx with a Si/(Zr+Si) content ranging between 4-9% by atomic ratio. The capacitor structure further includes an interfacial TiO2/TiON layer between the storage node and the capacitor dielectric.
    Type: Application
    Filed: February 10, 2012
    Publication date: August 15, 2013
    Inventors: Noel Rocklein, Vishwanath Bhat, Chris Carlson
  • Publication number: 20130165945
    Abstract: Systems and methods are described herein that improve control of a shapeable or steerable instrument using shape data. Additional methods include of controlling a shapeable instrument within an anatomical region using a robotic medical system.
    Type: Application
    Filed: June 24, 2010
    Publication date: June 27, 2013
    Applicant: Hansen Medical, Inc.
    Inventors: Matthew J. ROELLE, Neal A. TANNER, Robert G. YOUNGE, Chris CARLSON, Federico BARBAGLI, David CAMARILLO
  • Publication number: 20120320494
    Abstract: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10?7 amps/cm2 at from ?1.1V to +1.1V.
    Type: Application
    Filed: August 29, 2012
    Publication date: December 20, 2012
    Applicant: Micron Technology, Inc.
    Inventors: Rishikesh Krishnan, John Smythe, Vishwanath Bhat, Noel Rocklein, Bhaskar Srinivasan, Jeff Hull, Chris Carlson
  • Patent number: 8310807
    Abstract: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10?7 amps/cm2 at from ?1.1V to +1.1V.
    Type: Grant
    Filed: June 12, 2009
    Date of Patent: November 13, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Rishikesh Krishnan, John Smythe, Vishwanath Bhat, Noel Rocklein, Bhaskar Srinivasan, Jeff Hull, Chris Carlson
  • Publication number: 20120282754
    Abstract: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10?7 amps/cm2 at from ?1.1V to +1.1V.
    Type: Application
    Filed: July 16, 2012
    Publication date: November 8, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Rishikesh Krishnan, John Smythe, Vishwanath Bhat, Noel Rocklein, Bhaskar Srinivasan, Jeff Hull, Chris Carlson
  • Publication number: 20120267757
    Abstract: A method for using a metal bilayer is disclosed. First, a bottom electrode is provided. Second, a dielectric layer which is disposed on and is in direct contact with the lower electrode is provided. Then, a metal bilayer which serves as a top electrode in a capacitor is provided. The metal bilayer is disposed on and is in direct contact with the dielectric layer. The metal bilayer consists of a noble metal in direct contact with the dielectric layer and a metal nitride in direct contact with the noble metal.
    Type: Application
    Filed: April 20, 2011
    Publication date: October 25, 2012
    Inventors: Vassil Antonov, Vishwanath Bhat, Chris Carlson
  • Publication number: 20120241865
    Abstract: One aspect of the present invention provides an integrated circuit structure including a semiconductor substrate, a bottom dielectric layer positioned on the substrate, at least two capping dielectric layers positioned on the bottom dielectric layer, and a metal layer positioned on the at least two capping dielectric layers, wherein one of the two capping dielectric layers is an aluminum oxide layer, and the other is a silicon oxide layer. Another aspect of the present invention provides an integrated circuit structure including a bottom electrode, a bottom dielectric layer positioned on the bottom electrode, at least two capping dielectric layers positioned on the bottom dielectric layer, and a top electrode positioned on the at least two capping dielectric layers, wherein one of the two capping dielectric layers is an aluminum oxide layer, and the other is a silicon oxide layer.
    Type: Application
    Filed: March 21, 2011
    Publication date: September 27, 2012
    Applicant: NANYA TECHNOLOGY CORPORATION
    Inventors: Vassil Antonov, Vishwanath Bhat, Noel Rocklein, Chris Carlson
  • Publication number: 20120225268
    Abstract: Methods of forming an insulative element are described, including forming a first metal oxide material having a first dielectric constant, forming a second metal oxide material having a second dielectric constant different from the first, and heating at least portions of the structure to crystallize at least a portion of at least one of the first dielectric material and the second dielectric material. Methods of forming a capacitor are described, including forming a first electrode, forming a dielectric material with a first oxide and a second oxide over the first electrode, and forming a second electrode over the dielectric material. Structures including dielectric materials are also described.
    Type: Application
    Filed: March 2, 2011
    Publication date: September 6, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Vassil Antonov, Jennifer K. Sigman, Vishwanath Bhat, Matthew N. Rocklein, Bhaskar Srinivasan, Chris Carlson
  • Publication number: 20120202356
    Abstract: Methods of forming rutile titanium dioxide. The method comprises exposing a transition metal (such as V, Cr, W, Mn, Ru, Os, Rh, Ir, Pt, Ge, Sn, or Pb) to oxygen gas (O2) to oxidize the transition metal. Rutile titanium dioxide is formed over the oxidized transition metal. The rutile titanium dioxide is formed by atomic layer deposition by introducing a gaseous titanium halide precursor and water to the oxidized transition metal. Methods of forming semiconductor structures having rutile titanium dioxide are also disclosed.
    Type: Application
    Filed: February 7, 2011
    Publication date: August 9, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Tsai-Yu Huang, Vishwanath Bhat, Vassil Antonov, Chris Carlson
  • Publication number: 20120199944
    Abstract: Methods of forming a capacitor including forming at least one aperture in a support material, forming a titanium nitride material within the at least one aperture, forming a ruthenium material within the at least one aperture over the titanium nitride material, and forming a first conductive material over the ruthenium material within the at least one aperture. The support material may then be removed and the titanium nitride material may be oxidized to form a titanium dioxide material. A second conductive material may then be formed over an outer surface of the titanium dioxide material. Capacitors, semiconductor devices and methods of forming a semiconductor device including the capacitors are also disclosed.
    Type: Application
    Filed: February 7, 2011
    Publication date: August 9, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Tsai-Yu Huang, Vishwanath Bhat, Vassil Antonov, Chun-I Hsieh, Chris Carlson
  • Patent number: 8236372
    Abstract: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10?7 amps/cm2 at from ?1.1V to +1.1V.
    Type: Grant
    Filed: June 12, 2009
    Date of Patent: August 7, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Rishikesh Krishnan, John Smythe, Vishwanath Bhat, Noel Rocklein, Bhaskar Srinivasan, Jeff Hall, Chris Carlson
  • Patent number: 8187933
    Abstract: Some embodiments include dielectric structures. The structures include first and second portions that are directly against one another. The first portion may contain a homogeneous mixture of a first phase and a second phase. The first phase may have a dielectric constant of greater than or equal to 25, and the second phase may have a dielectric constant of less than or equal to 20. The second portion may be entirely a single composition having a dielectric constant of greater than or equal to 25. Some embodiments include electrical components, such as capacitors and transistors, containing dielectric structures of the type described above. Some embodiments include methods of forming dielectric structures, and some embodiments include methods of forming electrical components.
    Type: Grant
    Filed: September 30, 2010
    Date of Patent: May 29, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Noel Rocklein, Chris Carlson, Dave Peterson, Cunyu Yang, Praveen Vaidyanathan, Vishwanath Bhat
  • Publication number: 20120100283
    Abstract: Some embodiments include methods of forming capacitors. A metal oxide mixture may be formed over a first capacitor electrode. The metal oxide mixture may have a continuous concentration gradient of a second component relative to a first component. The continuous concentration gradient may correspond to a decreasing concentration of the second component as a distance from the first capacitor electrode increases. The first component may be selected from the group consisting of zirconium oxide, hafnium oxide and mixtures thereof; and the second component may be selected from the group consisting of niobium oxide, titanium oxide, strontium oxide and mixtures thereof. A second capacitor electrode may be formed over the first capacitor electrode. Some embodiments include capacitors that contain at least one metal oxide mixture having a continuous concentration gradient of the above-described second component relative to the above-described first component.
    Type: Application
    Filed: December 29, 2011
    Publication date: April 26, 2012
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Vassil Antonov, Vishwanath Bhat, Chris Carlson
  • Patent number: 8107218
    Abstract: Some embodiments include methods of forming capacitors. A metal oxide mixture may be formed over a first capacitor electrode. The metal oxide mixture may have a continuous concentration gradient of a second component relative to a first component. The continuous concentration gradient may correspond to a decreasing concentration of the second component as a distance from the first capacitor electrode increases. The first component may be selected from the group consisting of zirconium oxide, hafnium oxide and mixtures thereof; and the second component may be selected from the group consisting of niobium oxide, titanium oxide, strontium oxide and mixtures thereof. A second capacitor electrode may be formed over the first capacitor electrode. Some embodiments include capacitors that contain at least one metal oxide mixture having a continuous concentration gradient of the above-described second component relative to the above-described first component.
    Type: Grant
    Filed: June 2, 2009
    Date of Patent: January 31, 2012
    Assignee: Micron Technology, Inc.
    Inventors: Vassil Antonov, Vishwanath Bhat, Chris Carlson
  • Publication number: 20110319714
    Abstract: Systems and methods are described herein that improve control of a shapeable or steerable instrument using shape data. Additional methods include preparing a robotic medical system for use with a shapeable instrument and controlling advancement of a shapeable medical device within an anatomic path. Also described herein are methods for altering a data model of an anatomical region.
    Type: Application
    Filed: June 24, 2010
    Publication date: December 29, 2011
    Applicant: Hansen Medical, Inc.
    Inventors: Matthew J. ROELLE, Neal A. TANNER, Robert G. YOUNGE, Chris CARLSON, Federico BARBAGLI, David CAMARILLO
  • Publication number: 20110319910
    Abstract: Systems and methods are described herein that improve control of a shapeable or steerable instrument using shape data. Additional methods include of controlling a shapeable instrument within an anatomical region using a robotic medical system.
    Type: Application
    Filed: June 24, 2010
    Publication date: December 29, 2011
    Applicant: Hansen Medical, Inc.
    Inventors: Matthew J. ROELLE, Neal A. TANNER, Robert G. YOUNGE, Chris CARLSON, Federico BARBAGLI, David CAMARILLO