Patents by Inventor Chris Fanelli

Chris Fanelli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for reducing contamination of semiconductor devices and materials during wafer processing
    Patent number: 7531431
    Abstract: Methods of processing a semiconductor structure including a metal layer in the presence of organic material include flowing an aqueous mixture including an oxidizing agent over the semiconductor structure during processing of the semiconductor structure. Processing the semiconductor structure may include sawing the semiconductor structure and/or scrubbing the semiconductor structure with pressurized water. The oxidizing agent may include a peroxide, such as hydrogen peroxide, or another oxidizing agent.
    Type: Grant
    Filed: May 19, 2006
    Date of Patent: May 12, 2009
    Assignee: Cree, Inc.
    Inventors: Barry Rayfield, Chris Fanelli, Mitch Jackson
  • Methods for reducing contamination of semiconductor devices and materials during wafer processing
    Publication number: 20070269980
    Abstract: Methods of processing a semiconductor structure including a metal layer in the presence of organic material include flowing an aqueous mixture including an oxidizing agent over the semiconductor structure during processing of the semiconductor structure. Processing the semiconductor structure may include sawing the semiconductor structure and/or scrubbing the semiconductor structure with pressurized water. The oxidizing agent may include a peroxide, such as hydrogen peroxide, or another oxidizing agent.
    Type: Application
    Filed: May 19, 2006
    Publication date: November 22, 2007
    Inventors: Barry Rayfield, Chris Fanelli, Mitch Jackson